一种新型组合谐振腔微波等离子体炬  

A Novel Microwave Plasma Torch with Combined Resonators

作　　者：王彬彬 丁海兵 吉忠浩 陆登峰 WANG Bin-bin;DING Hai-bing;JI Zhong-hao;LU Deng-feng(Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing 100180,China;University of Chinese Academy of Sciences,School of Electronics,Electrical and Communication Engineering,Beijing 100180,China)

机构地区：[1]中国科学院空天信息创新研究院,北京100190 [2]中国科学院大学电子电气与通信工程学院,北京100180

出　　处：《真空电子技术》2023年第4期21-25,共5页Vacuum Electronics

摘　　要：微波等离子体电子密度大,电子温度高,在材料合成、有害气体消解、光谱分析等领域有着广泛的应用前景。本文提出了一种新型的组合谐振腔微波等离子体炬,利用一个微波源通过功分器后分别激励两个不同的谐振腔,微波馈入谐振腔后,在谐振腔内产生驻波,在驻波波腹处电场强度最大完成等离子体的激发,实现在较小微波输入功率、大气压下的空气击穿并形成大体积的等离子体火焰。通过对谐振腔结构尺寸优化,使谐振腔内的电场强度达到激励和维持微波等离子体的要求。With high electron density and high electron temperature,microwave plasma has wide application prospect in material synthesis,harmful gas digestion,spectral analysis and so on.A novel microwave plasma torch with combined resonators is proposed,in which a microwave source passing through a power splitter incentives two different resonant cavities.When the microwave is fed into the cavity,standing waves are generated inside.The electric field intensity reaches maximum at the abdomen of the standing wave and excites the plasma.This process can achieve air breakdown at atmospheric pressure and form a large volume plasma flame with a small microwave power input.Parameters of the resonator are optimized,so that the electric field intensity in the resonator can meet the requirements of the excitation and maintenance of microwave plasma.

关 键 词：微波等离子体 谐振腔 空气击穿 电磁仿真 多物理场 

分 类 号：TN136[电子电信—物理电子学]