锥面镜磁流变抛光去除函数畸变规律分析与演绎  

Distortion law analysis and deduction of removal function for magnetorheological finishing of conical mirror

作　　者：杨军[1] 樊炜[1] 海阔 张云飞[1] 黄文[1] YANG Jun;FAN Wei;HAI Kuo;ZHANG Yunfei;HUANG Wen(Institute of Machinery Manufacturing Technology,China Academy of Engineering Physics,Mianyang 621900,China)

机构地区：[1]中国工程物理研究院机械制造工艺研究所,四川绵阳621900

出　　处：《光学精密工程》2023年第16期2383-2394,共12页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.61605182,No.12162008,No.52005463);中国工程物理研究院创新发展基金创新项目资助(No.K1267-2022-TCF);装发部项目资助(No.211ZW22001);国家重点研发计划资助项目(No.2017YPA0701200)。

摘　　要：磁流变抛光是实现锥镜低表面损伤、面形误差高效抑制的重要工艺,然而锥面磁流变抛光去除函数畸变严重、畸变规律复杂,而现有方法难以直接有效建立其去除函数模型,导致面形收敛效率低下。本文分析了锥面曲率效应对磁流变抛光去除函数畸变的影响机制,研究去除函数的基准化特征参数关于平均曲率的解析规律,建立了由平面到锥面的磁流变抛光去除函数演绎方法。该方法将锥面去除函数的长宽、体去除率、峰去除率演变规律综合纳入到演绎之中,更全面地反映了锥面曲率效应下的磁流变抛光去除函数的畸变特性,同时避免了理化特性参数测量以及复杂方程和非线性问题的求解,为实际工况下锥面去除函数演绎提供一种有效、低成本方法。重复性采斑实验结果显示锥面去除函数特征参数的演绎误差为3.20%~12.02%,证明了该演绎方法具有较强的适用性。Magnetorheological finishing(MRF)is an important process for reducing surface damage and ef⁃ficiently suppressing the surface error in conical mirrors.However,because of the serious distortion and complex distortion law of the removal function for MRF of conical surfaces,existing methods have failed to establish the removal function model directly and effectively,resulting in a low surface convergence efficien⁃cy.In this study,the influence mechanism of the conical curvature effect on the distortion of the MRF re⁃moval function was analyzed.In addition,the analytical rule of the normalized characteristic parameters of the removal function for the mean curvature was studied.Furthermore,the removal function deduction scheme from plane to cone was established.This method integrates the evolution laws of the length and width of the conical MRF removal function,volume removal rate,and peak removal rate into the deduction to more comprehensively reflect the distortion characteristics of the MRF removal function under the conical curvature effect.It avoids the measurement of physical and chemical characteristic parameters and the solv⁃ing of complex equations and nonlinear problems,providing an effective,low-cost method for the removal function deduction of conical MRF under actual conditions.The results of repetitive spot sampling experi⁃ments show that the deduction errors of the characteristic parameters of the conical removal function are be⁃tween 3.20%and 12.02%,demonstrating the strong applicability of the proposed deduction method.

关 键 词：锥面镜 磁流变抛光 去除函数演绎方法 特征参数 平均曲率 

分 类 号：TH706[机械工程—仪器科学与技术]