高频相位激光测距系统的高精度鉴相  

High-precision phase discrimination for high-frequency phase laser ranging system

作　　者：孟语璇 董登峰 周维虎 纪荣祎 朱志忠 MENG Yuxuan;DONG Dengfeng;ZHOU Weihu;JI Rongyi;ZHU Zhizhong(Institute of Microelectronics of the Chinese Academy of Sciences,Beijing 100029,China;University of Chinese Academy of Sciences,Beijing 101408,China)

机构地区：[1]中国科学院微电子研究所,北京100029 [2]中国科学院大学,北京101408

出　　处：《光学精密工程》2023年第15期2193-2202,共10页Optics and Precision Engineering

基　　金：国家重点研发计划资助项目(No.2020YFB1710500,No.2019YFB2006100);国家高质量发展专项(No.TC220H05T)。

摘　　要：相位测距是一种非常重要的绝对测距手段,是大尺寸精密测量的重要保障。提高激光调制频率并采用高性能器件实现高频采样分析是提升相位激光测距精度最有效的方式之一。针对高性能器件的最大采样频率总是受限,难以满足高调制频率采样的难题,分析验证了欠采样方法用于相位测距的可行性,同时仿真分析了全相位傅里叶频谱分析法(allphase Fast Fourier Transform,apFFT)提高鉴相精度的优势。在此基础上,提出“欠采样+apFFT”的方法,并构建了激光相位测距的鉴相系统。当调制频率为201 MHz,欠采样频率为100 MHz时,系统鉴相精度高于±0.04°,对应的测距精度为±0.08 mm。实验结果表明,基于“欠采样+apFFT”的相位测距方法具有高精度、抗干扰能力强等优势,在科学研究与工程应用中具有重要价值。Phase laser ranging is an important means of absolute ranging and an important guarantee for large-scale precision measurement.One of the most effective ways to improve the precision of phase laser ranging is to increase the laser modulation frequency and use high-performance devices to achieve high-fre⁃quency sampling analysis.However,the maximum sampling frequency of high-performance devices is lim⁃ited.To solve the problem that existing devices have difficulty in the sampling of high modulation frequen⁃cies,the feasibility of an undersampling method for phase ranging was analyzed and verified.The advan⁃tages of all-phase fast Fourier transform(apFFT)analysis was examined to improve the precision of phase laser detection.Based on this idea,the method of undersampling and apFFT was developed,and a phase detection system for laser phase ranging was constructed.When the modulation frequency is 201 MHz and the undersampling frequency is 100 MHz,the system phase discrimination accuracy is higher than±0.04°,and the corresponding ranging accuracy is approximately±0.08 mm.The experimental results show that the phase ranging method based on undersampling and apFFT has the comprehensive advantag⁃es of high accuracy and strong anti-interference ability,making it valuable for scientific research and engi⁃neering applications.

关 键 词：相位测距 欠采样 全相位频谱分析法 高精度 鉴相系统 

分 类 号：TN249[电子电信—物理电子学] TH711[机械工程—测试计量技术及仪器]