基于飞秒激光加工MZI的多参量传感特性研究  

Multi-Parameter Sensing Characteristics Based on Femtosecond Laser Processing Mach-Zehnder Interferometer

作　　者：彭敏 刘昌宁 鲁志琪 陈宁 许秀梅 周文标 Peng Min;Liu Changning;Lu Zhiqi;Chen Ning;Xu Xiumei;Zhou Wenbiao(College of Physics and Electronic Science,Hubei Normal University,Huangshi 435002,Hubei,China)

机构地区：[1]湖北师范大学物理与电子科学学院,湖北黄石435002

出　　处：《应用激光》2023年第7期58-64,共7页Applied Laser

基　　金：湖北师范大学研究生教育教学改革研究重点项目(2023JY02);研究生创新科研项目(2023Z019);国家级2023大学生创新创业训练计划项目(基于拉锥型光纤光栅传感器及其工业应用)。

摘　　要：设计一款基于单模光纤-细芯光纤-单模光纤拼接而成,并由飞秒激光刻写的马赫-曾德尔干涉仪型的多参量传感器,研究其高温、曲率与折射率传感特性。通过飞秒激光在整段细芯上刻写一条直线,破坏细芯的芯层,增强了传感器对外界参量变化的敏感度。试验结果表明,该传感器能够应用于高温下测量,从常温至330℃范围内,温度灵敏度为15.5 pm/℃,拟合度为0.988;从330℃至580℃范围内,温度灵敏度为40.9 pm/℃,拟合度为0.996。此外,曲率在0.3622 m^(-1)~1.1454 m^(-1)范围内,曲率灵敏度为2.357 dB/m^(-1),线性拟合度为0.9717;折射率在1.3330~1.3652范围内,折射率灵敏度为-24.327 nm/RIU,线性拟合度为0.9899。该传感器制作简单,鲁棒性良好,体积小,能够实现高温、曲率和折射率的测量。The purpose of this work is to evaluate the sensing capabilities of a device based on a single mode fiber-thin core fiber-single mode fiber Mach-Zehnder interferometer for high temperature,curvature,and refractive index measurements.A femtosecond laser is used to produce a straight line on the entire thin core,and the fiber core is destroyed to increase the sensor′s sensitivity to the changes in external parameters.With a temperature sensitivity of 15.5pm/℃and a linear fitting of 0.988in the range of temperature to 330℃,experimental results show that this sensor is well-suited for high-temperature measurement.Temperature sensitivity increases to 40.9pm/℃with a linear fitting of 0.996in the temperature range of 330℃to 580℃.The sensor also has a curvature sensitivity of 2.357dB/m^(-1)with a linear fitting of 0.9717in the curvature range of 0.3622m^(-1)to 1.1454m^(-1),as well as a refractive index sensitivity of-24.327nm/RIU with a linear fitting of 0.9899in the refractive index range of 1.3330~1.3652.This sensor is easy to make,extremely sturdy,compact,and capable of monitoring high temperatures,curvature,and refractive index.

关 键 词：飞秒激光加工 温度 曲率 折射率 

分 类 号：O436[机械工程—光学工程] TB321[理学—光学]