基于激光跟踪干涉测长的基准尺测量方法研究  

Research on Datum Measurement Method Based on Laser Tracking Interference Length Measurement

作　　者：胡晓磊 张丰[1] 任瑜[1] 傅云霞[1] Hu Xiaolei;Zhang Feng;Ren Yu;Fu Yunxia(Shanghai Institute of Measurement and Testing Technology,Shanghai 201203,China)

机构地区：[1]上海市计量测试技术研究院,上海201203

出　　处：《应用激光》2023年第7期94-100,共7页Applied Laser

基　　金：上海市科委项目-面向飞机制造的大尺寸测量及溯源技术研究(19511106500)。

摘　　要：为提高传统激光跟踪干涉测长方法的准确性,使基准尺的量值溯源更为可靠,提出一种多姿态下的基准尺测量优化方法。该方法首先在传统激光跟踪干涉测长的基础上,构建多姿态的基准尺布局,并通过激光跟踪仪采集该布局下不同基准尺方向上的测量信息,然后采用基于权重的测量结果优化策略对测量数据进行组合优化,进而输出测量结果并进行误差源分析及不确定度评定,最后基于该优化方案对1000 mm的基准尺进行试验分析,并与精度较高的三坐标测量机法进行比对,En值为0.1,验证了不确定度评定的合理性,且通过试验对比发现,多姿态的测量优化方案所输出的参考长度较单姿态更为可靠。该优化方法为实现高精度大尺寸基准尺的量值溯源提供了新的校准方案,具有良好的实用性和一定的指导意义。In order to improve the accuracy of the traditional laser tracking interferometric measurement method and make the datum traceability more reliable,an optimization method of datum measurement in multiple attitudes is proposed in this paper.The method firstly constructs a multi-attitude datum layout on the basis of the traditional laser tracking interferometry,and collects measurement information in different datum directions by laser tracker,and then uses a weight-based measurement result optimization strategy to optimize the combination of measurement data,and then outputs the measurement results and performs error source analysis and uncertainty evaluation.The experimental analysis of the reference ruler based on this optimization scheme and the comparison with the higher accuracy CMM method,the Envalue is 0.1,which verifies the reasonableness of the uncertainty assessment,and the experimental comparison shows that the reference length output by the multi-attitude measurement optimization scheme is more reliable than the single attitude.The optimized method provides a new calibration scheme for realizing the measurement traceability of high-precision large-size datum rulers,which has a good practicality and certain guiding significance.

关 键 词：量值溯源 基准尺 激光跟踪干涉测长 布局 组合优化 

分 类 号：O348.11[理学—固体力学]