支撑机构对工作台振动传递率的影响  

The Influence of Support Plate on Vibration Transmission Rate of Stage

作　　者：李龙飞 赵宏宇 关宏武[1] 李树彦 LI Longfei;ZHAO Hongyu;GUAN Hongwu;LI Shuyan(The 45th Research Institute of CETC,Beijing 101601,China)

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2023年第4期52-55,共4页Equipment for Electronic Products Manufacturing

摘　　要：针对精密工作台,研究其支撑机构对振动传递率的影响。通过仿真计算的方法,对比分析了接口布局、接口刚度、支撑板模态频率及阻尼等对支撑板至工作台的振动传递率影响。结果显示,支撑板的模态频率、支撑板与工作台的接口刚度、接口布局均可改变工作台在整个系统中的模态频率,进而影响振动传递率;同时,阻尼对X、Y、Z向的振动传递率均有抑制作用,阻尼值越大,抑制作用越明显。Research the influence of support mechanism on vibration transmission rate of precision stage.By means of simulation calculation,the influences of interface layout,interface stiffness,modal frequency and damping of support plate on vibration transmission rate from support plate to stage are compared and analyzed.The results show that the modal frequency of support plate,interface stiffness between support plate and stage,and the layout of interface can change modal frequency of stage in the whole system,thus affecting vibration transmission rate from support plate to stage.At the same time,damping can inhibit the vibration transmissibility in X、Y、Z three directions.The greater damping value,the more obvious inhibition effect.

关 键 词：精密工作台 支撑板 阻尼 模态频率 振动传递率 

分 类 号：TN305[电子电信—物理电子学]