基于范德华异质结的多功能场效应晶体管制备及性能研究  

The preparation and performance research of multifunctional field-effecttransistor based on van der Waals heterostructures

作　　者：胡永康 许易龙 郝俊 王瑞洲 朱金龙 毛彩霞 薛丽 胡永红 HU Yongkang;XU Yilong;HAO Jun;WANG Ruizhou;ZHU Jinlong;MAO Caixia;XUE Li;HU Yonghong(School of Nuclear Technology and Chemistry&Biology,Hubei University of Science and Technology,Xianning 437100,China;School of Electronic and Information Engineering,Hubei University of Science and Technology,Xianning 437100,China)

机构地区：[1]湖北科技学院核技术与化学生物学院,湖北咸宁437100 [2]湖北科技学院电子与信息工程学院,湖北咸宁437100

出　　处：《湖北大学学报（自然科学版）》2023年第5期766-773,共8页Journal of Hubei University：Natural Science

基　　金：国家自然科学基金项目(11747044);国家级大学生创新创业计划训练项目(202210927002)资助

摘　　要：二维材料范德华异质结的研究推动了新型电子器件的发展.最近基于此类材料的电子器件时有报道,但鲜见同时具备逻辑运算和数据存储功能的电子设备.该研究采用机械剥离等方法,设计和制作了一种基于石墨烯/六方氮化硼/二硫化钼范德华异质结的多功能半浮栅场效应晶体管.研究发现,在单个器件构型中同时成功地实现了场效应管、半浮栅场效应管和二极管功能.而且电学测试结果进一步表明:作为经典的晶体管,它可以用于逻辑运算;作为半浮栅场效应管可用于非易失性存储器,而且保留时间可达10年以上,且其开/关比可达103;作为二极管用于整流,其整流比可达103.因此,本工作制备的多功能半浮栅场效应管有望在逻辑运算、数据储存和整流器开关等方面得到广泛应用.The recent development of van der Waals(vdW)heterostructures based on various two-dimensional(2D)materials have brought exceptional opportunities in designing novel electronic devices.Although various electronic devices based on 2D heterostructres have been reported,multifunctional devices that can combine logic operations and data storage functions are still quite rare.In our work,adopting mechanical stripping and other methods,we designed and fabricated half-floating gate field-effect transistor based on graphene/h-BN/MoS 2 vdW heterostuctures.MOSFET,floating-gate MOSFET,and diode functions were successfully achieved in this single device configuration simultaneously.The results of electrical tests indicate that,as a classical MOSFET,this device can be used for logic operation.And as an FG-MOSFET,it can be retained for 10 years with an on/off ratio of 103.And as a diode for rectification,its rectification ratio is up to 103.Therefore,this multifunctional HFGFET could find potential applications in logic operations,data storage,rectifier switching,etc.

关 键 词：异质结构 半浮栅 多功能 非易失性存储器 二极管 

分 类 号：TN386[电子电信—物理电子学]