光学元件磁流变加工驻留时间粒子群优化算法  

Particle Swarm Optimization Algorithm for Dwell Time of Optical Element in Magnetorheological Finishing

作　　者：高博 王佳[1,2,3] 范斌 张帅[1,2,3,4] GAO Bo;WANG Jia;FAN Bin;ZHANG Shuai(National Key Laboratory of Optical Field Manipulation Science and Technology,Chengdu 610209,CHN;Advanced Manufacturing Center of Optics,Chinese Academy of Sciences,Chengdu 610209,CHN;Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,CHN;University of Chinese Academy of Sciences,Beijing 100049,CHN)

机构地区：[1]光场调控科学技术全国重点实验室,成都610209 [2]中国科学院先进光学研制中心,成都610209 [3]中国科学院光电技术研究所,成都610209 [4]中国科学院大学,北京100049

出　　处：《半导体光电》2023年第3期395-399,共5页Semiconductor Optoelectronics

基　　金：国家自然科学基金项目(62075220);国家重点研发计划项目(2021YFC2202101)。

摘　　要：为实现光学元件磁流变高精度加工,基于脉冲迭代原理,提出基于粒子群算法的驻留时间优化方法。该方法在脉冲迭代法的基础上引入粒子群算法对整体面型残差进行优化,通过对整体驻留时间的判定,从而实现每个驻留时间点的最优选择,达到高精度面形加工。通过对Φ156 mm光学表面仿真加工,均方根(RMS)值和峰谷(PV)值从初始的169.164和1 161.69 nm收敛到23.492 5和807.215 6 nm。仿真结果表明,该算法能在保证面形收敛精度的同时快速获得稳定可靠的驻留时间分布,能有效降低中频误差,其算法性能优于常用的脉冲迭代法。该算法为磁流变抛光光学元件过程中的驻留时间计算提供了一种解决方案。A dwell time optimization method on particle swarm optimization algorithm is proposed for the high-precision magnetorheological machining of optical components based on pulse iteration principle.This method introduced the particle swarm optimization algorithm to optimize the residual error of the overall surface on the basis of the pulse iteration method.Through the determination of the overall dwell time,the optimal selection of each dwell time point was realized and the high-precision surface machining was achieved.The root mean square(RMS) and peak valley(PV) values of Φ156 mm optical surface simulation converged from the initial 169.164 and 1 161.69 nm to 23.492 5 and 807.215 6 nm.The simulation results show that the proposed algorithm not only ensures the accuracy of surface convergence,but also obtains stable and reliable dwell time distribution.The proposed algorithm is better than the common pulse iteration method,effectively reducing the mid-spatial error.This algorithm provides a solution for the dwell time calculation in the process of magnetorheological finishing optical components.

关 键 词：光学加工 磁流变抛光 驻留时间 中频误差 

分 类 号：TH161[机械工程—机械制造及自动化] TH74