仿鱼类侧线系统的MEMS尾流探测传感器的设计与制备  

Design and Preparation of Fish-Like Lateral Line System MEMS Wake Detection Sensor

作　　者：乔庆宇 孔祥正 武淑峰 张国军[1] 杨玉华[1] 王任鑫[1] Qiao Qingyu;Kong Xiangzheng;Wu Shufeng;Zhang Guojun;Yang Yuhua;Wang Renxin(State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学省部共建动态测试技术国家重点实验室,太原030051

出　　处：《微纳电子技术》2023年第7期1058-1069,共12页Micronanoelectronic Technology

基　　金：国家自然科学基金(52275578,51875535,61927807);科技部重点研发计划(2020YFC0122102);山西省基础研究计划(20210302123027,20210302124203);山西省“1331工程”重点学科建设计划基金资助项目(1331KSC)。

摘　　要：根据鱼类侧线系统的仿生学原理研制了一种具有二维矢量性的微电子机械系统(MEMS)尾流探测传感器,解决了现有的人工侧线传感器大多只能检测一维流场的问题。这种尾流探测传感器的核心敏感元件(纤毛十字梁结构)采用MEMS技术制备,通过在十字梁上布置压敏电阻组成惠斯通电桥将尾流信号转化成电压信号。基于侧线管道神经丘的压力梯度感知机制,运用有限元分析软件设计了仿鱼类侧线管道的导流封装帽。通过模拟尾流环境对传感器样品进行灵敏度和矢量性测试。结果表明,传感器的灵敏度为107 mV·(m/s)^(-1),检测阈值为0.3 m/s。此外,矢量性测试结果验证了MEMS尾流探测传感器具有矢量性。这种尾流探测传感器可以应用于水下无人潜航器的尾流探测跟踪,这将对海洋勘测具有重要意义。Based on the bionics principle of fish lateral line system,a two-dimensional vector micro-electromechanical system(MEMS)wake detection sensor was developed to solve the problem that most of the existing artificial lateral line sensors can only detect one-dimensional flow field.The core sensitive element of the wake detection sensor(i.e.the ciliated cross beam structure)was prepared by MEMS technology.The wake signal was converted into voltage signal by laying varistors on the cross beam to form Wheatstone bridge.Based on the pressure gradient sensing mechanism of the nerve mound of lateral line canal,the diversion package cap of fish-like lateral line canal was designed by using finite element analysis software.The sensitivity and vectorality of the sensor sample were tested by simulating the wake environment.The results show that the sensitivity of the sensor is 107 mV.(m/s)^(-1),and the detection threshold is 0.3 m/s.In addition,the vectorality test result verifies the vectorality of MEMS wake detection sensor.The wake detection sensor can apply to the wake detection and tracking of unmanned underwater vehicle,which will be of great significance to ocean exploration.

关 键 词：微电子机械系统(MEMS) 尾流探测传感器 侧线系统 压力梯度 矢量性 

分 类 号：TH703[机械工程—仪器科学与技术] TP212[机械工程—精密仪器及机械]