超声喷雾热解法制备ATO-FTO双层膜的电热特性  

Electrothermal Performance of ATO-FTO Bilayer Films Prepared by Ultrasonic Spray Pyrolysis

作　　者：梁昌兴 罗月婷 陈远豪 肖黎 龚恒翔[1,2] LIANG Changxing;LUO Yueting;CHEN Yuanhao;XIAO Li;GONG Hengxiang(Chongqing University of Technology,Institute of Photovoltaic New Energy Application Technology and Equipment,Chongqing 400054,China;Chongqing University of Technology,Physics Experiment Center,Chongqing 400054,China;Chongqing University of Technology,Chongqing Key Laboratory of Green Energy Material Technology and Systems,Chongqing 400054,China)

机构地区：[1]重庆理工大学光伏新能源应用技术与设备研究所,重庆400054 [2]重庆理工大学物理实验中心,重庆400054 [3]绿色能源材料技术与系统重庆市重点实验室,重庆400054

出　　处：《材料科学与工程学报》2023年第4期638-644,698,共8页Journal of Materials Science and Engineering

基　　金：重庆市教育委员会科学技术研究基金资助项目(KJQN202201137);教育部产学合作协同育人资助项目(220704090283039);重庆市自然科学基金资助项目(cstc2021jcyj-bshX0219);重庆理工大学研究生教育高质量资助项目(gzljg2023315)。

摘　　要：为改善氟掺杂氧化锡(FTO)基薄膜的电热性能,采用超声喷雾热解法(USP)在石英衬底上制备ATO-FTO双层膜,研究ATO膜层厚度对双层膜结构、表面形貌以及电热性能的影响。研究结果表明:制备的双层膜为高度结晶的四方金红石结构,随着ATO膜层厚度的增加,双层膜沿着(200)晶面取向性增强,双层膜表面晶粒形貌由锥体状逐渐变为块状,且晶粒大小明显变大;当ATO膜层厚度从210 nm增加到860 nm,双层膜的方块电阻从11.03Ω/sq减小到4.75Ω/sq;电热测试结果表明,相较于单一的FTO或ATO薄膜,双层膜的电热性能得到了显著提高。FTO和ATO薄膜在20 V外加电压所达到的最高平衡温度分别为265.7℃、210℃,发热效率分别为3.66×10^(-4)W/(℃·mm^(2))、3.85×10^(-4)W/(℃·mm^(2))。当双层膜中ATO膜层厚度为860 nm时,双层膜在20 V外加电压时最高平衡温度提高到440℃,发热效率提升为3.04×10^(-4)W/(℃·mm^(2))。在热循环测试过程中双层膜的最高平衡温度波动小于3.3%,展现出优异电热稳定性。To improve the electrothermal performances of FTO based films,an ultrasonic spray pyrolysis method was applied to prepare ATO-FTO bilayer films on quartz substrates.The influence of the ATO film thickness on the structure,surface morphology and electrothermal performance of the bilayer films was conducted.Experimental results demonstrate that the prepared bilayer films are highly crystallized with a tetragonal rutile structure.As the thickness of the ATO film layer increases,the orientation along the(200)crystal planes of the film increases.The grain morphology of the film surface changes from a pyramidal shape to blocks gradually.Moreover,the square resistance of the film decreases from 11.03Ω/sq to 4.75Ω/sq as the thickness of the ATO film increase from 210 nm to 860 nm.The electric heating test results prove that the electrothermal performance of the bilayer films has been significantly improved.Comparing to the maximum equilibrium temperatures of 265.7℃and 210℃at a 20 V bias voltage for FTO and ATO films,a temperature as high as 440℃can be achieved for ATO-FTO bilayer films with the ATO layer of 860 nm.Besides,the heating efficiency is 3.04×10^(-4)W/(℃·mm^(2))for ATO-FTO bilayer films,indicating the ATO-FTO bilayer has excellent electrothermal performance with thermal stability.

关 键 词：ATO-FTO双层膜 超声喷雾热解法 方块电阻 电热性能 发热效率 

分 类 号：O484.42[理学—固体物理]