射频碳氟等离子提升环氧树脂沿面耐电性能的研究  

Study on Ehancment of Surface Electric Resistance of Epoxy Resin by Radio Frequency Fluorocarbon Plasma

作　　者：王晨旭 吴锡鹏 刘孝平 郭前鑫 高春阳 谢坤 李文栋[2] 张冠军[2] WANG Chenxu;WU Xipeng;LIU Xiaoping;GUO Qianxin;GAO Chunyang;XIE Kun;LI Wendong;ZHANG Guanjun(CHN Energy Group Guoyuan Power Co.,Ltd.,Beijing 100032,China;State Key Laboratory of Electrical Insulation and Power Equipment,Xi’an Jiaotong University,Xi’an 710049,China)

机构地区：[1]国家能源集团国源电力有限公司,北京100032 [2]西安交通大学电力设备电气绝缘国家重点实验室,西安710049

出　　处：《高压电器》2023年第9期133-141,共9页High Voltage Apparatus

基　　金：国家自然科学基金项目(52207172);南方电网公司科技项目(036100kk52210003)。

摘　　要：在绝缘系统中复合界面的沿面耐电强度远低于固体、气体或真空侧的击穿场强,这严重限制了电力设备的整体绝缘性能。表面氟化被证明是提升绝缘材料沿面耐电性能的有效手段,其中利用碳氟等离子体对绝缘材料进行表面氟化展现出独特的优势。文中采用CF_(4)射频电容耦合等离子体(capacitively coupled plasma,CCP)对环氧树脂进行表面改性以提升其表面绝缘性能。利用单反相机和光谱仪诊断CCP的放电模式和活性粒子,建立一维流体仿真模型对其电子能量和密度进行分析。通过原子力显微镜、X射线光电子能谱仪、表面电位衰减测量平台、表面电位扫描平台及真空闪络试验平台来评估样品的表面物理化学特性和沿面耐电性能。结果表明,CF_(4)CCP表面处理能在环氧树脂表面引入碳氟基团并促进表面形貌重整。经10 min处理后,样品的真空闪络电压可提高27.6%,C-F的强电负性和表面粗糙度的增加不仅有助于增加表面陷阱密度,抑制二次电子发射雪崩的发展,而且减轻了表面电荷积累,最终提高了环氧树脂的闪络电压。In insulation system,the surface electric resistance strength of composite interface is much lower than the breakdown electrical strength at the solid,gas or vacuum side,which limits seriously the overall insulation performance of electrical equipment.Surface fluorination has been proved to be an effective means to improve the surface electrical resistance performance of insulating materials,in which surface fluorination of the insulation material by using fluorocarbon plasma exhibits unique advantages.In this paper,the surface modification of the epoxy resin(EP)was performed by CF_(4) capacitively coupled plasma(CCP)for the improvement of its surface insulation performance.The discharge mode and active particles of CF_(4) capacitively cowpled plasrna(CCP)were diagnosed by the digital single lens reflex camera and spectrometer.A fluid simulation model was set up to analyze its electron energy and density.The surface physicochemical properties and electrical resistance properties of samples were evaluated by atomic force microscopy,X-ray photoelectron spectroscopy,the surface potential decay measurement platform,surface potential scanning measurement platform and vacuum flash-over test platform.The results show that fluorocarbon groups can be introduced to the surface of epoxy resin and surface morphology will change after CF_(4) CCP surface treatment.Furthermore,the vacuum flash-over voltage of the sample can be increased by 27.6%after 10 min treatment.The increase of the strong electro negativity of C-F and of surface roughness not only help increase the surface traps density,inhibit the development of secondary electron emission avalanche(SEEA),but also alleviate the surface charge accumulation and finally increase the surface flash-over voltage of epoxy resin.

关 键 词：四氟化碳 射频电容耦合等离子体 表面改性 沿面耐电性能 

分 类 号：TM215.1[一般工业技术—材料科学与工程]