电感型光学超导转变边沿探测器件光学谐振腔设计  

Design of Optical Resonant Cavities for Inductive Type Optical Superconducting Transition Edge Detector Devices

作　　者：王振宇 钟青[2] 曾九孙 李劲劲[2] 徐骁龙 王雪深[2] WANG Zhen-yu;ZHONG Qing;ZENG Jiu-sun;LI Jin-jin;XU Xiao-long;WANG Xue-shen(College of Metrology and Measurement Engineering,China Jiliang University,Hangzhou,Zhejiang 310018,China;National Institute of Metrology,Beijing 102200,China)

机构地区：[1]中国计量大学计量测试工程学院,浙江杭州310018 [2]中国计量科学研究院,北京102200

出　　处：《计量学报》2023年第8期1159-1162,共4页Acta Metrologica Sinica

基　　金：国家自然科学基金(61901432)。

摘　　要：为提高电感型光学超导转变边沿探测器件的探测效率,针对波长633 nm的光子,厚度15 nm的铌(Nb)膜光子吸收层,设计了一种基于Al全反射层、SiO2和SiNx减反层的谐振腔结构。通过仿真,选取低反射率参数分布区间,利用终点探测曲线作为谐振腔性能的判断依据,通过磁控溅射工艺和化学气相沉积工艺制备了谐振腔,并使用分光光度计测试了反射率,结果表明:制备的谐振腔可将633 nm光波反射率降低至0.9%,并对506~690 nm宽波段光也有良好的减反效果(反射率<1%)。To improve the detection efficiency of the inductive optical superconducting transition edge detector devices,a resonant cavity structure based on an Al total reflection layer,SiO 2 and SiN x anti-reflection layer is designed and fabricated on a 15 nm niobium(Nb)film photon absorber layer for the 633 nm wavelength.The reflectivity is simulated with the Concise Macleod software and the layer structure of the resonant cavity for the lowest reflectivity is selected.The resonant cavity is prepared by a magnetron sputtering process and a following chemical vapor deposition process with an end point detection.The reflectivity is characterized by a spectrophotometer,which shows that the prepared resonant cavity can reduce the reflectivity at 633 nm to be only 0.9%,and also has good anti reflection effect,the reflectivity for from 506 nm to 690 nm to be<1%.

关 键 词：计量学 超导转变边沿 超导Nb膜 反射率 光学谐振腔 化学气相沉积 磁控溅射 

分 类 号：TB96[机械工程—光学工程]