基于激光干涉与电容传感复合校准技术的纳米微动台分辨力评价方法研究  

Research on Resolution Evaluation Method of Nano-Positioning Stage Based on Laser Interference and Capacitive Sensor Composite Calibration Technology

作　　者：阎晗 张树[2,3] 皮磊[2] 马英瀚 胡佳成 施玉书[2,3] YAN Han;ZHANG Shu;PI Lei;MA Ying-han;HU Jia-cheng;SHI Yu-Shu(Colloge of Metrology&Measurement Engineering,China Jiliang University,Hangzhou,Zhejiang 310018,China;National Institute of Metrology,Beijing 100029,China;Shenzhen Institute Technology Innovation,Shenzhen,Guangdong 518132,China)

机构地区：[1]中国计量大学计量测试工程学院,浙江杭州310018 [2]中国计量科学研究院,北京100029 [3]深圳中国计量科学研究院,广东深圳518132

出　　处：《计量学报》2023年第8期1196-1201,共6页Acta Metrologica Sinica

基　　金：国家重点研发计划(2021YFF0700403);国家市场监督管理总局质量技术基础能力建设专项(ANL2003)。

摘　　要：激光干涉仪测量纳米级分辨力时,因环境等因素的干扰测量具有局限性,电容传感器可较好地对抗这种干扰,但存在无溯源性、非线性误差的缺点。为实现纳米级分辨力的量值溯源,保障量值准确性,采用激光干涉仪对电容传感器进行校准,从而形成纳米微动台-电容传感器-激光干涉仪的完成溯源链。通过量值溯源实验可知,在10 nm步进下电容传感器与激光干涉仪测量量值最大偏差为0.8 nm;电容传感器分辨力校准实验中,纳米位移台分辨力为2 nm。上述结果说明此校准方法具有一定的可行性和实用性。When measuring nanometer resolution with laser interferometer,the interference measurement is limited due to environmental factors.Capacitive sensor can resist this kind of interference well,but it has the disadvantages of untraceable and nonlinear error.In order to realize the measurement traceability of nanoscale resolution and ensure the accuracy of the measurement value,we use laser interferometer to calibrate the capacitor sensor,so as to form a complete traceability chain of nanometer microtable-capacitance sensor-laser interferometer.The maximum deviation of the measured value between the capacitance sensor and the laser interferometer at 10 nm step is 0.8 nm,and the resolution of the nano stages is 2 nm in the capacitance sensor resolution calibration experiment.The above results show that the calibration method is feasible and practical.

关 键 词：计量学 分辨力校准 激光干涉仪 电容传感器 纳米微动台 

分 类 号：TB92[一般工业技术—计量学]