基于MEMS原子气室的饱和吸收稳频系统研究  

Research on Saturation Absorption Frequency Stabilization System Based on Rb MEMS Vapor Cell

作　　者：刘亚蕾 贾朔 蒋志远 王瑾 王建波[2] 袁德成[1] 林平卫[2] 马爱文[3] 屈继峰[2] LIU Ya-lei;JIA Shuo;JIANG Zhi-yuan;WANG Jin;WANG Jian-bo;YUAN De-cheng;LIN Ping-wei;MA Ai-wen;QU Ji-feng(Shenyang University of Chemical Technology,Shenyang,Liaoning 110142,China;National Institute of Metrology,Beijing 100029,China;Chinese Society for Measurement,Beijing 100029,China)

机构地区：[1]沈阳化工大学,辽宁沈阳110142 [2]中国计量科学研究院,北京100029 [3]中国计量测试学会,北京100029

出　　处：《计量学报》2023年第8期1272-1276,共5页Acta Metrologica Sinica

基　　金：国家自然科学基金青年基金(62205324);国家自然科学基金面上基金(62075206);科技部重点研发计划(2022YFF0608304);计量院基本科研业务费(AKYZD2206)。

摘　　要：利用微机电系统(MEMS)制造工艺制备微型铷(Rb)原子气室,并应用于饱和吸收光谱和激光稳频。通过深反应离子刻蚀和阳极键合工艺,实现玻璃-硅-玻璃“三明治”结构三腔型原子气室。以780 nm波长的外腔半导体激光器作为饱和吸收光谱光源,搭建了基于MEMS Rb原子气室的饱和吸收光谱稳频桌面系统,实现了对MEMS气室控温加热,并分析了对不同温度、不同激光功率条件下的饱和吸收谱线。基于锁相放大器实现频率锁定,利用拍频方法对系统频率稳定度进行评估,实验结果表明:积分时间为1 s和100 s时的频率稳定度分别为2.7×10^(-11)和6.3×10^(-12)。A microfabricated rubidium(Rb)atomic vapor cell is fabricated through micro-electro-mechanical system(MEMS)fabrication technology,which is applied to saturated absorption spectra and laser frequency stabilization.To achieve the three cavities glass-silicon-glass‘sandwich’structure,deep reactive ion etching and anodic bonding processes are adopted.Saturated absorption spectra frequency stabilization system based on Rb MEMS atomic vapor cell is built with an external cavity semiconductor laser with at 780 nm.The MEMS vapor cell is heated and temperature controlled,and the saturated absorption spectra at different temperatures and optical powers are analysed.The experiment adopts the beat frequency method by two lasers after the laser frequency is locked through lock-in amplifier to evaluate the performance of the system.Experimental result shows that frequency stability of 1 s and 100 s integration time is 2.7×10^(-11) and 6.3×10^(-12).

关 键 词：计量学 激光稳频 饱和吸收 铷原子气室 微机电系统 

分 类 号：TB939[一般工业技术—计量学] TB96[机械工程—测试计量技术及仪器]