皮秒激光加工的微织构对碳化硅润湿性的影响  

Effects of Micro Texture Processed by Picosecond Laser on Hydrophobicity of Silicon Carbide

作　　者：徐昊[1] 钱伟[2,3] 花银群 叶云霞[3,4] 戴峰泽[3] 蔡杰[2,3] XU Hao;QIAN Wei;HUA Yinqun;YE Yunxia;DAI Fengze;CAI Jie(Institute for Advanced Material,Jiangsu University,Zhenjiang 212013,China;Institute of Advanced Manufacturing and Modern Equipment Technology,Jiangsu University,Zhenjiang 212013,China;School of Mechanical Engineering,Jiangsu University,Zhenjiang 212013,China;Institute of Micro-Nano Optoelectronics and Terahertz Technology,Jiangsu University,Zhenjiang 212013,China)

机构地区：[1]江苏大学新材料研究院,镇江212013 [2]江苏大学先进制造与现代装备技术研究所,镇江212013 [3]江苏大学机械工程学院,镇江212013 [4]江苏大学微纳光电子与太赫兹技术研究所,镇江212013

出　　处：《无机材料学报》2023年第8期923-930,共8页Journal of Inorganic Materials

基　　金：国家自然科学基金(51641102)。

摘　　要：为改善碳化硅的表面润湿性能,本研究利用脉冲激光加工表面处理和化学改性分别改善了碳化硅的表面形貌和表面能。实验选用皮秒激光加工方式构造表面微织构,利用激光共聚焦显微镜分析了微织构的微观形貌,并进一步分析了烧蚀形态与激光自身特性和加工参数之间的联系。研究发现,激光加工效果以烧蚀为主,重熔为辅,而由于碳化硅烧蚀阈值和激光能量在光斑中的高斯分布特性,形成的微织构的烧蚀凹槽呈倒三角形。此外,选用的氟硅烷修饰剂使碳化硅表面从亲水表面转变为疏水表面;通过改变加工参数获得不同微织构并进行氟硅烷修饰后,碳化硅表面接触角最大提高到157°,达到了超疏水效果。为了进一步探讨微织构对疏水性的影响原理,提出了一个基于实际形貌参数的固液接触角模型。该模型阐释了接触角随微织构特征参数变化的机制,固、气、液两两之间的接触面积影响了表面润湿性,这为寻找具有最佳疏水性能的微织构提供了新的理论指导。To enhance the surface morphology and surface energy of silicon carbide to improve its surface wetting properties,picosecond pulsed laser surface treatment and chemical modification techniques were used,respectively.Additionally,a confocal laser microscope was used to analyze the microfabrication microstructure and the relationship between ablation pattern,laser properties,and processing parameters.Results demonstrated that ablation and remelting were the dominant factors influencing the laser processing effect.An inverted triangle-shaped ablation groove was observed due to ablation threshold of silicon carbide and Gaussian distribution of laser energy in the spot.Fluoroalkyl silane modifier used in the experiments could transform the silicon carbide surface from hydrophilic to hydrophobic.By varying processing parameters of pulsed laser treatment,contact angle of the modified silicon carbide surface increased to a maximum of 157°.To better understand the effect of micro-textures on hydrophobicity,we developed a solid-liquid contact angle model based on the actual morphological parameters which elucidated the mechanism of contact angle variation with characteristic parameters of micro-textures,providing theoretical guidance for finding micro-textures with optimal hydrophobic performance.

关 键 词：碳化硅 微织构 疏水性 皮秒激光加工 

分 类 号：TQ174[化学工程—陶瓷工业]