探讨PCB曝光机定位平台精度的提升  

Discussion on improvement of positioning accuracy of PCB exposure machine precision positioning stage

作　　者：方林 李辉 FANG Lin;LI Hui(Circuit Fabology Microelectronics Equipment Co.,Ltd.,Hefei 230088,Anhui,China)

机构地区：[1]合肥芯碁微电子装备股份有限公司,安徽合肥230088

出　　处：《印制电路信息》2023年第9期13-16,共4页Printed Circuit Information

摘　　要：为了减轻印制电路板(PCB)曝光机精密定位平台因直线电机发热而引起定位精度变化的问题,设计了一种定位平台直线电机散热方案用于提升散热效率,从而提升定位平台定位精度。试验测试结果表明:定位平台增加了强制风冷装置,电机的温度变化下降了48%,平台定位精度变化降低了69%。使用该散热方案,可提升直线电机的散热效果,减少电机发热对定位平台定位精度的影响,提高精密定位平台的稳定性。In order to reduce the change of positioning accuracy caused by linear motor heating of precision positioning stage,a heat dissipation scheme of linear motor of precision positioning stage is designed to improve the heat dissipation efficiency and positioning accuracy of positioning stage.The test results show that when the forced air cooling device is added to the positioning platform,the temperature change of the linear motor decreases by 52%,and the change value of the positioning accuracy decreases by 69%.The heat dissipation scheme can improve the heat dissipation effect of the linear motor,reduce the influence of motor heating on the positioning accuracy of the positioning platform,and improve the stability of the precision positioning platform.

关 键 词：曝光机 定位平台 直线电机 散热 定位精度 

分 类 号：TH16[机械工程—机械制造及自动化]