基于FDTD仿真算法的硅基光子集成分析  

Analysis of Silicon Based Photon Integration Based on FDTD Simulation Algorithm

作　　者：仝香 TONG Xiang(Jiangsu Huai'an Technician College,Jiangsu 223001,China)

机构地区：[1]江苏省淮安技师学院,江苏223001

出　　处：《电子技术（上海）》2023年第7期36-38,共3页Electronic Technology

摘　　要：阐述硅基微结构材料在界面光学调控中的应用,包括多种平面光学结构设计在宽谱透反射的特性,目标是实现一种具有高抗反射性质以及便于微加工的硅基光学抗反射膜。This paper describes the application of silicon-based microstructure materials in interface optical regulation,including the characteristics of various planar optical structure designs in wide spectral transmission and reflection.The goal is to achieve a silicon-based optical antireflection film with high antireflection properties and easy micromachining.

关 键 词：硅基光子学 抗反膜 微加工技术 

分 类 号：TN36[电子电信—物理电子学]