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作 者:杨鹏毅 汪梦瑶 姚宗影 曹狄峰[2] YANG Peng-yi;WANG Meng-yao;YAO Zong-ying;CAO Di-feng(Anhui Province Key Laboratory of Microsystem,the 43rd Research Institute of CETC,Hefei 230088,China;The 43rd Research Institute of CETC,Hefei 230088,China)
机构地区:[1]中国电子科技集团公司第四十三研究所微系统安徽省重点实验室,安徽合肥230088 [2]中国电子科技集团公司第四十三研究所,安徽合肥230088
出 处:《激光与红外》2023年第8期1240-1244,共5页Laser & Infrared
摘 要:并行多路数字光模块在短距离光通信中有广泛应用,并行多路数字光模块的电芯片、光芯片大都采用裸芯片,针对非气密封装会使裸芯片暴露在空气中导致氧化、可靠性不高的问题,本文提出了一种全气密封并行多路数字光模块的设计方法,采用LTCC基板四周设置焊环及管壳设计环框的新型结构,实现了数字光模块基板与管壳的直接焊接,从而实现了并行多路数字光模块的全气密性设计,解决了数字光模块非气密封设计难题。以12路收发一体数字光模块为例,本文不仅介绍了并行多路数字光模块的设计原理、并行多路光路耦合的设计方法,而且给出了全气密封并行多路数字光模块的完整结构和实现方法,试验表明,气密性(最大漏率)为5×10~(-9)P·m~3·s~(-1)。本文提出的设计结构对并行多路数字光模块的全气密性设计具有重要的参考价值。Parallel multi-channel digital optical modules are widely used in short distance off optical communication.Most of the electrical and optical chips of the parallel multi-channel digital optical modules are bare chips.For the problem that the bare chips would be exposed to air due to non-hermetic package,resulting in oxidation and low reliability,a new design method of parallel multi-channel digital optical module with hermetically sealed package is proposed in this paper.A new structure of ring frame is designed by setting welding rings and pipe shells around the LTCC substrate.The design of the hermetically sealed digital optical module is achieved due to the direct welding of the base plate and the shell of the digital optical module,which solves the problem of the non-hermetic design of the digital optical module.12 channels transceiver digital optical module as an example,the design principle of the parallel multi-channel digital optical module and the design method of the parallel multi-channel optical coupling not only are introduced,the complete structure and implementation method of the hermetically sealed digital optical module but also are presented in this paper.The test shows that the air tightness index(maximum leakage rate)is 5×10-9(P·m 3·s-1).The new structure proposed in this paper has an important reference value for the hermetic design of parallel multi-channel digital optical modules.
分 类 号:TN929.11[电子电信—通信与信息系统] TN29[电子电信—信息与通信工程]
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