基于5S管理模式的特气充装站现场管理应用  

On-site Management Application of Special Gas Filling Station Based on 5S Management Mode

作　　者：马福圈 常欣 王磊[1] 刘见华 袁振军[1] 万烨 MA Fuquan;CHANG Xin;WANG Lei;LIU Jianhua;YUAN Zhenjun;WAN Ye(National Engineering Research Center for Silicon-based Materials of Luoyang China Silicon Corporation Ltd.,Luoyang 471023,China;China ENFI Engineering Corporation Ltd.,Beijing 100038,China)

机构地区：[1]洛阳中硅高科技有限公司硅基材料制备技术国家工程研究中心,河南洛阳471023 [2]中国恩菲工程技术有限公司,北京100038

出　　处：《低温与特气》2023年第4期41-45,共5页Low Temperature and Specialty Gases

摘　　要：在当前高质量发展的背景下,我国加大了对半导体集成电路产业的支持力度,集成电路国产化替代的步伐加速进行。电子特气作为半导体制造的重要原材料,出货量大幅增长,这就对特气充装站的管理提出了更高要求。根据企业实际情况,按照5S管理模式对特气充装站进行管理,制定有效可行的5S管理推行方案,并应用到充装站的日常管理当中,能够有效改善生产现场环境、提升生产效率、保障产品品质、树立良好的企业形象,从而达到精益生产的目的。Under the background of the current high-quality development,China has strengthened its support for the semiconductor integrated circuit industry,and the pace of the localization of IC replacement has accelerated.As an important raw material for semiconductor manufacturing,the shipment of electronic special gas has increased greatly,which puts forward higher requirements for the management of special gas filling station.According to the actual situation of the enterprise,the special gas filling station shall be managed according to the 5S management mode,and an effective and feasible 5S management plan shall be formulated and applied to the daily management of the filling station,which can effectively improve the production site environment,enhance production efficiency,guarantee product quality and establish a good corporate image,so as to achieve the purpose of lean production.

关 键 词：5S管理 特气 充装站 现场管理 

分 类 号：X921[环境科学与工程—安全科学] TQ117[化学工程—无机化工]