基于光栅干涉仪的纳米位移台校准方法研究  

Study on the Calibration Method of Nano-Positioning Stages Using Grating Interferometers

作　　者：刘丽琴 管钰晴 邹文哲 郭创为 张玉杰 徐瑞书 傅云霞[1,2] 雷李华 LIU Liqin;GUAN Yuqing;ZOU Wenzhe;GUO Chuangwei;ZHANG Yujie;XU Ruishu;FU Yunxia;LEI Lihua(Shanghai Institute of Measurement and Testing Technology,Shanghai,201203,China;Shanghai Key Laboratory of Online Test and Control Technology,Shanghai,201203,China)

机构地区：[1]上海市计量测试技术研究院,上海201203 [2]上海市在线检测与控制技术重点实验室,上海201203

出　　处：《计量科学与技术》2023年第6期37-43,共7页Metrology Science and Technology

基　　金：上海市2021年度“科技创新行动计划”自然科学基金项目(21ZR1483100);上海市2021年度“科技创新行动计划”优秀学术/技术带头人项目(21XD1425000);国家重点研发计划青年科学家项目(2021YFF0603300)。

摘　　要：随着集成电路制造关键尺寸向着5 nm的节点迈进,我国集成电路检测设备产业化的呼声剧增,纳米位移台作为集成电路制造、超精密加工、精密科学仪器制造等领域检测设备的关键器件,研究人员对其重复定位精度、线性度的要求越来越高。光栅干涉仪以光栅作为标准物质溯源到长度基准,因其对环境因素的变化不敏感、抗干扰能力强、稳定性高的优点,成为微纳检测设备产业化的新方向。采用基于标准物质的光栅干涉仪,针对纳米位移台的重复定位精度、线性度分别设计了不同的校准方案,并通过实验验证方案的可行性,最后对该校准方法的测量不确定度和溯源性进行了分析,可以看出设计的校准方案测量稳定、溯源链短。As the critical dimensions in integrated circuit manufacturing approach the 5nm node,the demand for the industrialization of integrated circuit testing equipment has surged.The nano-positioning stage,a pivotal component in semiconductor manufacturing,ultra-precision machining,and precision instrument manufacturing,is experiencing increasingly stringent demands for its repetitive positioning accuracy and linearity.The grating interferometer,which leverages the pitch of the grating as a reference material for measurement,showcases remarkable environmental resilience and superior stability.This makes the grating interferometer an emerging trend in the industrialization of macro-nano measurement equipment.This study presents a calibration method for the nano-positioning stage using a grating interferometer.The feasibility of this method is confirmed through experimental validations.Furthermore,an in-depth analysis of the measurement uncertainty and traceability chain is conducted,highlighting the robustness and shortened traceability path of the proposed calibration approach.

关 键 词：计量学 光栅干涉仪 标准光栅 位移校准 纳米位移台 

分 类 号：TB921[一般工业技术—计量学]