Flux focusing with a superconducting nanoneedle for scanning SQUID susceptometry  

作　　者：B.K.Xiang S.Y.Wang Y.F.Wang J.J.Zhu H.T.Xu Y.H.Wang 

机构地区：[1]State Key Laboratory of Surface Physics and Department of Physics,FudanUniversity,200433 Shanghai,China [2]Shanghai Research Center for Quantum Sciences,201315 Shanghai,China

出　　处：《Microsystems & Nanoengineering》2023年第3期411-417,共7页微系统与纳米工程（英文）

基　　金：We would like to acknowledge support by the National Key R&D Program of China(Grant No.2021YFA1400100);National Natural Science Foundation of China(Grant Nos.11827805 and 12150003);Shanghai Municipal Science and Technology Major Project(Grant No.2019SHZDZX01).All of the authors are grateful for the experimental assistance of Y.P.Pan,Y.Feng,X.D.Zhou,and W.X.Tang.

摘　　要：A nanofabricated superconducting quantum interference device(nano-SQUID)is a direct and sensitive flux probe used for magnetic imaging of quantum materials and mesoscopic devices.Due to the functionalities of superconductive integrated circuits,nano-SQUIDs fabricated on chips are particularly versatile,but their spatial resolution has been limited by their planar geometries.Here,we use femtosecond laser 3-dimensional(3D)lithography to print a needle onto a nano-SQUID susceptometer to overcome the limits of the planar structure.The nanoneedle coated with a superconducting shell focused the flux from both the field coil and the sample.We performed scanning imaging with such a needle-on-SQUID(NoS)device on superconducting test patterns with topographic feedback.The NoS showed improved spatial resolution in both magnetometry and susceptometry relative to the planarized counterpart.This work serves as a proof-of-principle for integration and inductive coupling between superconducting 3D nanostructures and on-chip Josephson nanodevices.

关 键 词：LITHOGRAPHY SQUID NEEDLE 

分 类 号：TB383[一般工业技术—材料科学与工程]