正弦余弦算法支持向量回归在MEMS剪应力传感器温度补偿中的应用  

Application of sine cosine algorithm-support vector regression on temperature compensation of MEMS shear stress sensor

作　　者：张佳 陈永禄[2] 张莉 宫小清 ZHANG Jia;CHEN Yonglu;ZHANG Li;GONG Xiaoqing(School of Electronic Engineering,Xi’an Aeronautical University,Xi’an 710077,China;Chinese Flight Test Establishment,Xi’an 710089,China;Xi’an Yuanfang General Aviation Technology Development Co.,Ltd.,Xi’an 710089,China;Chinasoft International Technology Service Co.,Ltd.,Xi’an 710077,China)

机构地区：[1]西安航空学院电子工程学院,陕西西安710077 [2]中国飞行试验研究院,陕西西安710089 [3]西安远方航空技术发展总公司,陕西西安710089 [4]中软国际科技服务有限公司,陕西西安710077

出　　处：《Journal of Measurement Science and Instrumentation》2023年第3期263-269,共7页测试科学与仪器（英文版）

基　　金：Special Scientific Research Program of Shaanxi Provincial Department of Education(Nos.19JK0432,20JK0697)。

摘　　要：为解决电容式微机电系统(Micro-electromechanical system,MEMS)剪应力传感器输出信号随工作环境温度变化产生漂移的问题,提出了基于正弦余弦算法的支持向量回归(Sine cosine algorithm-support vector regression,SCA-SVR)温度补偿算法。首先,利用SVR对传感器温漂进行补偿;其次,基于SCA对SVR的超参数进行优化;最后,将所提出的SCA-SVR温度补偿算法与广泛应用的粒子群支持向量回归(Partical swarm optimization-support vector regression,PSO-SVR)算法进行实物实验对比。结果表明,基于SCA-SVR的温度补偿算法能够有效地对电容式MEMS剪应力传感器的输出温漂进行补偿,SCA-SVR算法补偿后的传感器输出信号与整定值间的相关系数提高至0.9996,均方根误差降低至0.0099 mV,比PSO-SVR算法补偿后的结果降低了一个数量级。To solve the output signal drift of capacitive micro-electromechanical system(MEMS)shear stress sensor caused by the change of operation temperature,a sine cosine algorithm-support vector regression(SCA-SVR)for temperature compensation is proposed.The hyper-parameters of SVR are optimized based on the SCA.The proposed SCA-SVR temperature compensation algorithm is compared with the widely used partical swarm optimization-support vector regression(PSO-SVR)algorithm through experiments.The experimental results indicate that the temperature compensation algorithm based on the SCA-SVR can effectively compensate the output temperature drift of capacitive MEMS shear stress sensor.The correlation coefficient between the sensor output signal compensated by the SCA-SVR algorithm and the calibration value is increased to 0.9996,and the root mean square error is reduced to 0.0099 mV,which is smaller than the counterpart of PSO-SVR by an order of magnitude.

关 键 词：微机电系统 剪应力传感器 温度补偿 正弦余弦算法 支持向量回归 

分 类 号：TH-39[机械工程] TP212[自动化与计算机技术—检测技术与自动化装置]