真空材料放气率高精度测量装置  

High-precision Measurement Device for Outgassing Rate of Vacuum Materials

作　　者：李津铭 王进伟 刘俊男 陈明 LI Jin-ming;WANG Jin-wei;LIU Jun-nan;CHEN Ming(Shanghai Advanced Research Institute,Chinese Academy of Sciences,Shanghai 201204,China;Shanghai Synchrotron Radiation Facility,Shanghai 201204,China)

机构地区：[1]中国科学院上海高等研究院,上海201204 [2]上海同步辐射光源,上海201204

出　　处：《真空》2023年第4期60-64,共5页Vacuum

摘　　要：介绍了上海光源二期线站工程机械真空辅助实验室研制的一套基于双通道气路转换法的真空材料放气率高精度测量装置,对同步辐射真空系统中常见的无氧铜材料样品开展放气率测试研究。实验测量并计算得出样品与本底和本底在不同温度状态、排气时间、气路转换后的放气量。结果显示,经72h,150℃高温烘烤后的无氧铜放气率为3.06×10^(-12)Pa·m^(3)·s^(-1)·cm^(-2),表明装置具有较高的放气率测试精度,可以满足同步辐射装置对超高真空材料放气率的测量要求。This paper introduces a set of high-precision measuring device for the outgassing rate of vacuum materials based on the method of switching between two pumping paths developed by the engineering machinery vacuum auxiliary laboratory of SSRFⅡbeamline project.Based on this method,the outgassing rate of common oxygen free copper material samples in the synchrotron radiation vacuum system was tested.The outgassing amount of the sample with background and the background in the conditions of different temperature,outgassing time,and after the gas path conversion was measured and caculated.The results show that the oxygen free copper outgassing rate is 3.06×10^(-12)Pa·m^(3)·s^(-1)·cm^(-2)after 72h baking at 150℃,it indicates that the device has a high test accuracy of outgassing rate which can meet the measurement requirements of synchrotron radiation device for the outgassing rate of ultra-high vacuum materials.

关 键 词：真空材料 放气率 双通道气路转换法 

分 类 号：TB74[一般工业技术—材料科学与工程]