X、Y方向非等R值微小非球面模具超精密磨削试验  

Ultra-precision Grinding Test of Micro Aspheric Die with Non-equal R Value in X and Y Direction

作　　者：王贺 何家林[1] 谢飞 李振 WANG He;HE Jialin;XIE Fei;LI Zhen(Jinken Vocational and Technical College,Nanjing 211100,China;MDTP-Optics Co.,Ltd.,Nanjing 211100,China)

机构地区：[1]金肯职业技术学院,南京211100 [2]南京迈得特光学有限公司,南京211100

出　　处：《机械工程师》2023年第10期154-156,共3页Mechanical Engineer

基　　金：金肯职业技术学院校级重点科研项目“改善光通信镜头耦合效率的搭配间隙优化”(JKKY202201Z)。

摘　　要：基于模压成型技术的复杂曲面光学玻璃透镜制造难度较大,主要制约因素是高精度复杂曲面光学模具的加工难度大。文中针对典型的高精度X、Y方向非等R值微小非球面模具,进行斜轴单点CXZB四轴联动超精密磨削试验,通过加工路径规划、磨削补偿、磨削表面测量与评价,验证了加工方法的可行性。研究发现,X、Y方向非等R值微小非球面模具PV值控制在0.38μm以下,表面粗糙度分别为Ra5 nm和Rz39 nm,加工表面呈光学镜面,模具加工质量完全满足后续的玻璃模压成型要求。It is difficult to manufacture optical glass lens with complex surface based on molding technology.The main restriction factor is the difficulty of machining optical mold with complex surface with high precision.This paper carries out the ultra precision oblique axis single point grinding test based on CXZB four axis linkage for typical high-precision micro aspheric molds with unequal R values in X and Y directions.The feasibility of the processing method is verified through processing path planning,ultra precision compensation grinding,grinding surface evaluation.It is found that the PV value of the micro aspheric mold with unequal R value in X and Y directions is controlled below 0.38μm,the surface roughness are Ra5 nm and Rz39 nm respectively,and the surface quality reaches the optical mirror level.The mold is suitable for subsequent glass molding manufacturing.

关 键 词：超精密磨削 复杂曲面 非球面 误差补偿 

分 类 号：TG58[金属学及工艺—金属切削加工及机床]