掺铝氧化锌(AZO)透明导电薄膜的研究进展  

Research progress of aluminum-doped zinc oxide(AZO)transparent conductive films

作　　者：孔德茹 安佳钰 刘靖 孙冬兰[1] KONG Deru;AN Jiayu;LIU Jing;SUN Donglan(Faculty of Science,Tianjin University of Science and Technology,Tianjin 300222,China;School of Chemical Engineering and Materials,Tianjin University of Science and Technology,Tianjin 300222,China)

机构地区：[1]天津科技大学理学院,天津300457 [2]天津科技大学化工与材料学院,天津300457

出　　处：《功能材料》2023年第9期9059-9069,共11页Journal of Functional Materials

基　　金：国家自然科学基金(21373150)。

摘　　要：新型掺铝氧化锌(AZO)透明导电薄膜光学性能优异,成本低廉,有望取代技术成熟的掺锡氧化铟(ITO)薄膜。主要简述了AZO薄膜的结构及其光电性能,重点综述了薄膜的制备工艺以及应用领域,对极具开发潜力的AZO薄膜的产业化前景进行了展望。Novel aluminum-doped zinc oxide(AZO)film has excellent optical properties and low cost,and is expected to replace the mature indium-doped tin oxide(ITO)film.This paper mainly describes the structure and optoelectronic properties of AZO thin films,and focuses on the preparation processes and application fields of the thin films.Finally,the future industrialization of AZO thin films is projected.

关 键 词：AZO薄膜 特性 制备工艺 应用 产业化前景 

分 类 号：O484[理学—固体物理]