硅基片上激光雷达技术综述  

Overview of LiDAR Technology on Silicon Substrate

作　　者：阳琴 陈孝林 曾诚 徐诗月 杨峰[1,2] 高剑波 Yang Qin;Chen Xiaolin;Zeng Cheng;Xu Shiyue;Yang Feng;Gao Jianbo(Southwest Institute of Technology and Physics,Chengdu 610041,Sichuan,China;College of Electronic Information,Sichuan University,Chengdu 610065,Sichuan,China)

机构地区：[1]西南技术物理研究所,四川成都610041 [2]四川大学电子信息学院,四川成都610065

出　　处：《激光与光电子学进展》2023年第16期12-25,共14页Laser & Optoelectronics Progress

摘　　要：硅基光电子技术的发展可以将激光雷达系统发射模块和接收模块中分立的有源和无源器件集成在芯片上,使激光雷达体积更小、稳定性更强、成本更低,推动激光雷达在自动驾驶等领域的应用。首先,分析激光雷达的基本概念及测量原理。随后,根据扫描方式的不同,将硅基片上激光雷达分为面阵闪光、光学相控阵、透镜辅助光束转向和慢光光栅等4类,并分别对其技术特点和研究进展进行阐述。最后,对目前硅基片上激光雷达的发展趋势进行了总结和展望。The development of silicon-based optoelectronics technology can integrate discrete active and passive components in the transmitting module and receiving module of the LiDAR system on the chip,making the LiDAR smaller in size,more stable and lower in cost,and accelerating the application of LiDAR in autonomous driving and other fields.In this paper,the basic concept and principle of LiDAR is first analyzed.Then,according to the different scanning modes,the LiDAR on silicon substrate is divided into four categories:array flash,optical phased array,lens-assisted beam steering,and slow light grating.The technical characteristics and recent progress of these four categories are described respectively.Finally,the development trend of LiDAR on silicon substrate is summarized and prospected.

关 键 词：激光雷达 硅基光电子 面阵闪光 光学相控阵 透镜辅助光束转向 

分 类 号：TN958.98[电子电信—信号与信息处理]