飞秒激光微加工蓝宝石晶片光纤压力传感器  

Optical Fiber Pressure Sensor Based on Sapphire Wafers Processed by Femtosecond Laser

作　　者：江毅[1,2] 张雨彤 邓辉 Jiang Yi;Zhang Yutong;Deng Hui(School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China;Key Laboratory of Photonic Information Technology,Ministry of Industry and Information Technology,Beijing 100081,China;School of Physical Science and Technology,Baotou Teachers'College,Baotou 014030,Inner Mongolia,China)

机构地区：[1]北京理工大学光电学院,北京100081 [2]信息光子技术工业和信息化部重点实验室,北京100081 [3]包头师范学院物理科学与技术学院,内蒙古包头014030

出　　处：《光学学报》2023年第15期80-87,共8页Acta Optica Sinica

基　　金：国家自然科学基金(U20B2057)。

摘　　要：提出了一种高温大量程的蓝宝石法布里-珀罗(F-P)干涉仪压力传感器。传感器由三层蓝宝石晶片直接键合而成,包括蓝宝石衬底、带通孔的蓝宝石晶片和感压蓝宝石晶片。飞秒激光用于在蓝宝石晶片的中心刻蚀通孔,并粗糙化感压蓝宝石晶片的外表面。利用蓝宝石晶片抛光面作为F-P腔的反射面,有助于降低解调出的光学腔长波动,提高压力分辨率。提出的传感器在室温、0~30 MPa的高压力范围内光学腔长随压力线性变化,压力灵敏度为0.1253μm/MPa,相对分辨率达到0.04%FS(full scale,全量程),且能在700℃下稳定工作。Objective Pressure monitoring in high-temperature environments is necessary for aerospace,chemical smelting,and petroleum power.Optical fiber sensors can be applied in the measurement of various parameters under high-temperature and harsh environment due to their advantages of passivity,anti-electromagnetic interference,high-temperature resistance,and compactness.The optimal technical approach for pressure measurement is the optical fiber extrinsic Fabry-Pérot interferometer(EFPI),which includes two typical structures of diaphragm-based type and diaphragm-free type.The principle of the diaphragm-free type is that as the refractive index of the gas in the open cavity changes linearly with the ambient pressure,diaphragm-free optical fiber pressure sensors can only measure the gas pressure,and its sensitivity is greatly affected by temperature.The diaphragm-type optical fiber EFPI pressure sensor based on different materials has been widely employed in pressure measurement.The working temperature of the sensor is mainly determined by the material of pressure sensing films.For example,the EFPI pressure sensor based on silicon dioxide is limited by the softening of the glass diaphragm at high temperature,and the working temperature for a long time is generally lower than 800℃.With a melting point of 2045℃and a wide transmission spectral range,sapphire is an ideal material for developing ultra-high temperature optical fiber sensors.To measure pressure in high-temperature and harsh environment,we propose and experimentally demonstrate a sapphire Fabry-Pérot(F-P)interferometer with high temperature and large pressure range.The sensor is fabricated by direct bonding of three-layer sapphire wafers,including the sapphire substrate,the sapphire wafer with a through hole,and pressure-sensitive sapphire wafer.Methods Firstly,a femtosecond laser is adopted to slice the sapphire wafer.The sapphire wafer is fixed on the sixdimensional micro-motion platform,and the laser power is adjusted to 30 mW through the attenuator.The

关 键 词：光纤光学 光纤压力传感器 非本征法布里-珀罗干涉仪 蓝宝石晶片 飞秒激光微加工 大压力量程 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]