激光差动共焦拉曼光谱高分辨图谱成像技术进展  

Research Progress on High Resolution Laser Differential Confocal Raman Spectroscopy

作　　者：邱丽荣[1,2] 崔晗 王允[1,2] 徐可米[1,2] 赵维谦 Qiu Lirong;Cui Han;Wang Yun;Xu Kemi;Zhao Weiqian(School of optics and Photonics,Beijing Institute of Technology,Beijing 100081,China;Key Laboratory of Complex-Field Intelligent Exploration,Ministry of Industry and Information Technology,Beijing Institute of Technology,Beijing 100081,China)

机构地区：[1]北京理工大学光电学院,北京100081 [2]北京理工大学复杂环境智能感测技术工业和信息化部重点实验室,北京100081

出　　处：《光学学报》2023年第15期385-398,共14页Acta Optica Sinica

基　　金：国家自然科学基金杰出青年项目(51825501);国家自然科学基金国家重大科研仪器研制项目(61827826)。

摘　　要：激光共焦拉曼光谱技术由于具有分子指纹及层析成像特性,成为探索微观分子世界的重要手段;但受原理限制,现有激光共焦拉曼光谱技术的分辨力及图谱成像能力逐渐桎梏了其发展。近年来,围绕激光共焦拉曼光谱技术性能改善方面,本研究团队基于发明的超分辨激光差动共焦技术,提出了激光差动共焦拉曼图谱成像系列新方法和新技术。系统地介绍所提激光差动共焦拉曼图谱系列测量方法及仪器化研究进展,并对未来发展方向进行了评述和展望。Significance Raman spectroscopy is already widely used as an analytical tool in a broad range of applications,due to its characteristics of molecular fingerprint,label-free,sample preparation-free,small sample amount,and non-invasive.As the introduction of confocal microscopy,laser confocal Raman spectroscopy has inherited the unique"molecular fingerprint"characteristics of Raman spectroscopy and the high-resolution tomographic imaging characteristics of confocal microscopy,making laser confocal Raman spectroscopy plays an important role on exploring the microscopic molecular world,and has gradually become an indispensable analysis and detection method in the fields of physical chemistry,manufacturing,archeology and geology,semiconductor,advanced materials,and biomedicine.However,with the in-depth research on nano-microscopic regions such as semiconductor devices and single-cell imaging,the requirements for confocal Raman spectroscopy are strict.At present,there are fundamental issues such as low spatial resolution and the simultaneous detection of geometric shape and spectral information,which limit confocal Raman spectroscopy's wider application to nanoscale sciences.Therefore,it has a great significance to handle these limitations to expand its application field.Progress In recent years,researchers have done lots of work on improving the imaging performance of confocal Raman spectroscopy.Under far-field optical conditions,the following three types of technologies are mainly used:High-resolution laser confocal Raman spectroscopy technology based on image restoration,this type of method is based on the existing confocal Raman spectroscopy system to perform image restoration processing on the detected Raman spectroscopy images to improve system resolution;High-resolution laser confocal Raman spectroscopy technology based on optical structure modulation,this type of method mainly uses spatial modulation technology to modulate the incident light or collected light beam to improve the system resolution;High-resoluti

关 键 词：共焦拉曼光谱 高分辨 图谱成像 差动共焦 

分 类 号：O436[机械工程—光学工程]