抗拉可压型压电陶瓷性能测试及疲劳试验  

Performance test and fatigue test of tensile/compressible piezoelectric ceramics

作　　者：李国会[1] 李国荣[2] 徐宏来[1] 张秋实 杜应磊[1] 时雪 向振佼 吴晶[1] Li Guohui;Li Guorong;Xu Honglai;Zhang Qiushi;Du Yinglei;Shi Xue;Xiang Zhenjiao;Wu Jing(Key Laboratory of Science and Technology on High Energy Laser,CAEP,P.O.Box 919-1002,Mianyang 621900,China;Shanghai Institute of Ceramics,Chinese Academy of Sciences,Shanghai 200050,China)

机构地区：[1]中国工程物理研究院应用电子学研究所,四川绵阳621900 [2]中国科学院上海硅酸盐研究所,上海200050

出　　处：《强激光与粒子束》2023年第10期54-59,共6页High Power Laser and Particle Beams

摘　　要：压电陶瓷是自适应光学系统中的核心器件变形镜的主要作动元件,其性能的好坏直接影响变形镜甚至自适应光学系统校正能力。开展了加载电压为±350 V、外形尺寸为5 mm×5 mm×38 mm的抗拉可压型压电陶瓷的性能测试,包括位移、迟滞、电容、阻抗和热膨胀系数等,对压电陶瓷的抗拉能力进行了考核,获得三个样品抗拉能力均大于250 N。采用疲劳测试仪对同批次生产的压电陶瓷进行疲劳试验,在此过程中获得了压电陶瓷的压电效应并对试验数据进行了分析,最后对5#样品进行了1000万次疲劳试验(±150 N@5 Hz正弦载荷),试验后压电陶瓷的位移减小约5%,其他指标变化较小。通过抗拉能力测试和疲劳试验,初步考核了该型压电陶瓷的抗拉压特性和疲劳特性以及压电陶瓷的使用寿命,为变形镜的研制提供一定的数据支撑。Piezoelectric ceramic is the main actuator of deformable mirror,which is the core device of adaptive optics system.Its performance directly affects the correction ability of deformable mirror and even adaptive optics system.Performance parameters of the tensile/compressible piezoelectric ceramics(5 mm×5 mm×38 mm)with loading voltage of±350 V were tested,including displacement,hysteresis,capacitance,impedance and coefficient of thermal expansion,etc.The test results show the tensile capacity of three samples was more than 250 N,and 10 million fatigue tests(±150 N@5 Hz sinusoidal load)were carried out on 5#sample.The experimental results show that the displacement and capacitance of the sample reduced than 5%.Through the tensile/pressure and fatigue test,the properties and service life of the piezoelectric ceramic were examined,which provides some supporting data for the development of deformable mirrors.

关 键 词：压电陶瓷 自适应光学 变形镜 疲劳特性 压电效应 

分 类 号：TN249[电子电信—物理电子学]