飞秒激光制备金属表面微纳结构及其技术应用  

Fabrication of Micro/Nano Structures on Metal Surfaces by Femtosecond Laser and Its Technical Applications

作　　者：王锁成 董世运[1] 闫世兴 刘晓亭 Wang Suocheng;Dong Shiyun;Yan Shixing;Liu Xiaoting(National Key Laboratory for Remanufacturing,Army Academy of Armored Forces,Beijing 100072,China)

机构地区：[1]陆军装甲兵学院装备再制造技术国防科技重点实验室,北京100072

出　　处：《激光与光电子学进展》2023年第17期45-60,共16页Laser & Optoelectronics Progress

基　　金：中国博士后基金面上项目(2021MD703945)。

摘　　要：飞秒激光加工是近年来微纳加工领域中一种重要的加工方法。飞秒激光不仅能够对材料进行表面改性、烧蚀,更具有在特定区域加工高精度三维结构的独特优势,飞秒激光加工在微纳加工领域有着广阔的应用前景。本文主要阐述了飞秒激光与金属相互作用的一般过程,介绍了飞秒激光直写加工、飞秒激光诱导产生表面周期性结构、飞秒激光复合化学方法等表面微纳结构的制备方法。然后,分别从环境工程、航空航天以及生物医学领域阐述了飞秒激光在金属表面制备微纳结构的应用。最后,对当前飞秒激光制备微纳结构的不足和未来研究方向进行总结和展望。Femtosecond laser has been an important processing technique for micro/nano structures in recent years.It can modify and ablate materials,and is capable of machining high-precision three-dimensional structures in specific areas.Femtosecond laser machining has broad application prospects in micro/nano processing.In this paper,the general interaction process between femtosecond laser and metals is described,and the methods for the preparation of micro/nano structures are introduced,such as femtosecond laser direct writing,femtosecond laser induced surface periodic structure,and femtosecond laser composite chemistry method.Then,the applications of femtosecond laser for the preparation of micro/nano structures on metal surfaces in environmental engineering,aerospace,and biomedicine are discussed.Finally,the shortcomings and future research directions of preparation of micro/nano structures by femtosecond laser are summarized and prospected.

关 键 词：飞秒激光 三维结构 微纳加工 表面微纳结构 

分 类 号：TN249[电子电信—物理电子学]