基于超材料吸收器的非致冷微红外热探测器  

Uncooled Micro-infrared Heat Detector Based on Metamaterial Absorber

作　　者：王海国 陈艺 祝连庆[1,2] 魏向阳 WANG Haiguo;CHEN Yi;ZHU Lianqing;WEI Xiangyang(Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument,Beijing Information Science and Technology University,Beijing 100192,CHN;Beijing Laboratory of Biomedical Testing Technology and Instruments,Beijing Information Science and Technology University,Beijing 100192,CHN)

机构地区：[1]北京信息科技大学光电测试技术及仪器教育部重点实验室,北京100192 [2]北京信息科技大学生物医学检测技术及仪器北京实验室,北京100192

出　　处：《半导体光电》2023年第4期508-514,共7页Semiconductor Optoelectronics

摘　　要：研究了一种基于超材料结构的红外热探测器,该探测器利用光学超材料的局域场增强效应和热释电材料的温度敏感特性,实现对红外辐射的探测。利用有限元分析方法,研究了超材料吸收器的红外吸收特性和电磁场特性,分析了超材料吸收器与热释电材料(LiTaO_(3))耦合结构的热学性能。结果表明,设计的超材料吸收器,可在3~15μm范围内调制峰值波长(主要覆盖大气窗口(8~14μm)),吸收率可达99.9%,带宽范围为0.2~1.0μm。当探测器的尺寸为23μm×23μm时,探测器稳态温度升高量为0.311 K,与类似工作相比,温度提升了约21倍。改进的红外热探测器具有显著的温度响应,适用于大规模像元级非致冷中远红外波段的热成像与传感应用。In this paper,an infrared thermal detector based on a metamaterials structure is proposed.It achieved the detection of radiation by utilizing the local field enhancement effect of optical metamaterials and the temperature-sensitive properties of pyroelectric materials.A finite element analysis method was utilized to analyze the infrared absorption characteristics and electromagnetic field properties of the metamaterial absorber,as well as to analyze the thermal properties of the coupled structure of the metamaterial absorber with a pyroelectric material(LiTaO_(3)).The results show that the designed metamaterial absorber can modulate the peak wavelength in the range of 3 to 15μm(mainly covering the atmospheric window(8~14μm)),with an absorbance rate of 99.9%and a bandwidth of 0.2 to 1μm.When the detector size is 23μm×23μm,the steady-state temperature increase of the detector is 0.311K,which is about 21 times higher compared to similar studies.Improved infrared heat detector has significant temperature response,and it is applicable to thermal imaging and sensing in uncooled midinfrared and far-infrared wavelengths at the large-scale image element level.

关 键 词：红外热探测器 超材料吸收器 有限元分析 热释电材料 

分 类 号：TN215[电子电信—物理电子学]