基于多模干涉波导结构的90°光混频器设计与制作  

The Design and Fabrication of 90°Optical Hybrid Based on MMI

作　　者：陈伟[1] 崔大建 黄晓峰[1] 周浪 肖入彬 吴维 刘昆 左欣 王立 严银林 CHEN Wei;CUI Dajian;HUANG Xiaofeng;ZHOU Lang;XIAO Rubin;WU Wei;LIU Kun;ZUO Xin;WANG Li;YAN Yinlin(Chongqing Optoelectronics Research Institute,Chongqing 400060,CHN)

机构地区：[1]重庆光电技术研究所,重庆400060

出　　处：《半导体光电》2023年第4期515-518,共4页Semiconductor Optoelectronics

摘　　要：设计并制作了一种基于多模干涉波导(MMI)结构的InP基90°光混频器芯片,该芯片的波导层材料为InGaAsP,包层和衬底材料为InP,芯片的单模波导宽度设计为2.6μm,多模干涉波导的长度和宽度分别设计为844和20μm。采用三维光束传播法(3D BPM),仿真分析了波导材料折射率、厚度、宽度和长度的工艺误差容限,仿真结果表明在1 535~1 565 nm波长范围内所设计的光混频器芯片的净插入损耗小于1 dB,相位偏差小于±5°。实验测试结果与仿真结果一致。A 90°optical hybrid based on an InP 4×4 multimode interference waveguide(MMI)was designed and fabricated.The optical hybrid was fabricated with InGaAsP waveguide layer,InP cladding layer and InP substrate.The width of the single mode waveguide was set to be 2.6μm,and the length and width of MMI were set to be 844 and 20μm,respectively.Three dimensional beam propagation method(3D BPM)was used to simulate and analyze the process error tolerance of refractive index,thickness,width and length of wavwguide materials.It is found that optical hybrid’s insertion loss is less than 1dB and phase deviation is less than 5°in the wavelength range of 1535~1565nm,which is consistent with the simulation result.

关 键 词：光混频器 磷化铟 多模干涉波导 相干光通信 

分 类 号：TN773[电子电信—电路与系统]