物距和光强变化对测量精度的影响研究及补偿  

Research and Compensation of Influence of Object Distance and Light Intensity Changes on Measurement Accuracy

作　　者：刘淼淼 蔡晋辉 李立新 孙蔡霞 郑台台 LIU Miaomiao;CAI Jinhui;LI Lixin;SUN Caixia;ZHENG Taitai(College of Metrology and Measurement Engineering,China Jiliang University,Hangzhou 310018,China)

机构地区：[1]中国计量大学计量测试工程学院,浙江杭州310018

出　　处：《仪表技术与传感器》2023年第9期100-103,111,共5页Instrument Technique and Sensor

摘　　要：针对工件测量尺寸精度受到物距和光源强度影响的问题,开展了基于物距和光源强度反馈的测量精度补偿研究。提出一种基于系统像素当量标定值和光源强度像素数误差量串行耦合的综合补偿方法,首先根据物距变化动态调整系统像素当量标定值;然后通过不同光源强度下的标准件实测像素数,建立光源强度像素数误差量模型;最后对图像物理尺寸测量结果进行综合补偿实验。实验结果表明:综合补偿法能够有效提高尺寸测量的精度,使测量误差小于14μm。Aiming at the problem that workpiece measurement accuracy is affected by object distance and light source intensity,research on measurement accuracy compensation based on object distance and light source intensity feedback was carried out.A comprehensive compensation method based on serial coupling of the system pixel equivalent calibration value and the pixel number error of the light source intensity was proposed.Firstly,the system pixel equivalent calibration value was dynamically adjusted according to the change in object distance.Then,the pixel number error model of light source intensity was established by measuring the pixel number of standard components under different light source intensities;Finally,a comprehensive compensation experiment was conducted on the image physical size measurement results.The experimental results show that the comprehensive compensation method can effectively improve the accuracy of dimensional measurement and make the measurement error less than 14μm.

关 键 词：尺寸检测 像素当量 光源强度 误差补偿 

分 类 号：TP391[自动化与计算机技术—计算机应用技术]