基于硅谐振压力传感器的开环特性测试  

Open-loop Characteristic Test Based on Silicon Resonant Pressure Sensor

作　　者：张志远 彭勇钢 Zhang Zhiyuan;Peng Yonggang(Department of Mechanical and Electronic Engineering,Shanxi Engineering Vocational College,Taiyuan Shanxi 030009,China;AVIC Taiyuan Aero-Instruments Co.,Ltd.,Taiyuan Shanxi 030006,China)

机构地区：[1]山西工程职业学院机械工程系,山西太原030009 [2]航空工业太原航空仪表有限公司,山西太原030006

出　　处：《山西电子技术》2023年第5期33-35,45,共4页Shanxi Electronic Technology

基　　金：2022年度山西省高等学校科技创新计划(2022L710);2022年度山西省高等学校科技创新计划(2022L708);2022年度山西工程职业学院院级校企合作类立项课题(XQ2022_04)。

摘　　要：谐振梁是硅谐振传感器的核心部件,其品质最终决定了传感器整体精度等级的高低。论文从硅谐振传感器开环特性的测试结果出发,利用了基于锁相放大器的开环测试系统,对谐振梁的振动特性进行了测量,得到了不同工作温度、不同激励条件下谐振梁的幅频特性曲线-温度曲线,据此分析得出测试结论,为实现闭环自激电路提供可靠依据。The resonant beam is the core component of the silicon resonant sensor,and its quality ultimately determines the overall accuracy level of the sensor.Starting from the test results of the open-loop characteristics of silicon resonant sensors,the vibration characteristics of the resonant beam are measured by using an open-loop test system based on lock-in amplifiers.The amplitude-frequency characteristic curve-temperature curve of the resonant beam under different operating temperatures and different excitation conditions are obtained,and the test conclusions are obtained based on this,which provides a reliable basis for the realization of closed-loop self-excitation circuit.

关 键 词：硅谐振压力传感器 谐振梁 振动特性 开环特性 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]