ZrYN层厚度对CrN/ZrYN纳米多层膜微观结构和力学性能的影响  

Effect of ZrYN layer thickness on microstructure and mechanical properties of CrN/ZrYN nanomultilayered film

作　　者：沈嘉豪 王静静[1] 杨志明 岳建岭 李伟[1] 马迅 SHEN Jiahao;WANG Jingjing;YANG Zhiming;YUE Jianling;LI Wei;MA Xun(School of Materials and Chemistry,University of Shanghai for Science and Technology,Shanghai 200093,China;San Men Nuclear Power Co.,Ltd.,Taizhou 310100,China;Powder Metallurgy Institute,Central South University,Changsha 410083,China)

机构地区：[1]上海理工大学材料与化学学院,上海200093 [2]三门核电有限公司,浙江台州317100 [3]中南大学粉末冶金研究院,长沙410083

出　　处：《有色金属材料与工程》2023年第5期53-59,74,共8页Nonferrous Metal Materials and Engineering

基　　金：国家自然科学基金资助项目(51971148;51471110)。

摘　　要：采用磁控溅射技术在单晶Si基片上交替沉积CrN层、ZrYN层,制备不同厚度ZrYN层的CrN/ZrYN纳米多层膜。利用X射线衍射仪、扫描电子显微镜、透射电子显微镜、纳米压痕仪表征纳米多层膜的微观结构和力学性能。结果表明:随着ZrYN层厚度的增大,纳米多层膜中CrN相的结晶程度呈现出先上升后下降的趋势;纳米多层膜的硬度、弹性模量、韧性也呈现出先增大后减小的趋势;当ZrYN层厚度为0.9 nm时,纳米多层膜具有最高的硬度、弹性模量、韧性,分别为20.3 GPa、210.4 GPa、2.25 MPa·m^(1/2)。上述结果表明,随着ZrYN层厚度的增大,纳米多层膜出现由晶态向非晶态转变,在非晶态下,能够获得良好的综合力学性能。CrN and ZrYN nanolayers were deposited alternately on single crystal Si substrate by magnetron sputtering technique,and CrN/ZrYN nanomultilayered films with different thicknesses ZrYN layer were prepared.The microstructure and mechanical properties of the nanomultilayered films were characterized by X-ray diffraction,scanning electron microscope and transmission electron microscope,and nanoindentation techniques.The results show that with the increase of the ZrYN layer thickness,the crystallization degree of CrN phase in the nanomultilayered film increases first and then decreases;the hardness,elastic modulus and toughness of the nanomultilayered film also show a trend of increasing first and then decreasing;When the thickness of ZrYN layer is 0.9 nm,the nanomultilayered film has the highest hardness,elastic modulus and toughness,which is 20.3 GPa,210.4 GPa and 2.25 MPa·m^(1/2),respectively.The above results show that with the increase of the thickness of the ZrYN layer,the transition from crystalline state to amorphous state occurs of the nanomultilayered films,and the comprehensive mechanical properties are obtained under the coherent interface.

关 键 词：CrN/ZrYN纳米多层膜 磁控溅射 硬度 韧性 

分 类 号：TQ174.444[化学工程—陶瓷工业]