零偏压下近红外集成单波长波导光探测器  

Integrated Single Wavelength Waveguide Photodetector in the Near Infrared Operating at Zero Bias

作　　者：高松 牛慧娟[1,2,3] 李真 范鑫烨 段晓峰[3] 黄永清[3] GAO Song;NIU Huijuan;LI Zhen;FAN Xinye;DUAN Xiaofeng;HUANG Yongqing(School of Physical Science and Information Engineering Liaoch1eng University,Liaocheng 252059,China;Shandong Key Laboratory of Optical Communication Science and Technology,Liaocheng University,Liaocheng 252059,China;State Key Laboratory of Information Photonics and Optical Communications,Beijing University of Posts and Telecommunications,Beijing 100876,China)

机构地区：[1]聊城大学物理科学与信息工程学院,山东聊城252059 [2]聊城大学山东省光通信科学与技术重点实验室,山东聊城252059 [3]北京邮电大学信息光子学与光通信重点实验室,北京100876

出　　处：《聊城大学学报（自然科学版）》2023年第5期49-55,共7页Journal of Liaocheng University:Natural Science Edition

基　　金：国家重点研发计划(2018YFB2200803);山东省自然科学基金项目(ZR2022MF305,ZR2022MF253,ZR2021MF053,ZR2021MF070);信息光子学与光通信国家重点实验室(北京邮电大学)开放基金项目(IPOC2021B07);山东省高校2021年青年引进与培养计划;聊城大学博士科研启动基金(318052168);山东省科技型中小企业创新能力提升工程(2022TSGC2570);教育部产学协同育人项目(220605160271242,221002802140950,220906093200103)资助。

摘　　要：提出了一种基于InGaAsP材料的零偏压单片集成波导光探测器。该器件单片集成了光子晶体(Photonic Crystals,PC)滤波器、锥形耦合器、零偏压波导光探测器(Wave-Guide Photodetector,WGPD)以及直波导,形成了一个平面微纳光信号接收子系统。集成的波导光探测器吸收峰值波长位于1.55μm处,光谱线宽仅1.6 nm。设计的波导光探测器在无外加偏压时具有良好性能,经优化,当其面积为4μm×15μm时其3 dB带宽达78 GHz@0 V,响应度为0.78 A/W。整个器件基于组分可调的InGaAsP材料,实现多功能器件的单片集成,具有高性能、小体积、低功耗、窄线宽等特性。Integrated Monochromatic near-infrared waveguide photodetector operating at zero-bias based on InGaAsP material is proposed.The device monolithically integrates a photonic crystal filter,a tapered coupler,a zero-bias waveguide photodetector,and a straight waveguide to form a planar micro-nano optical signal reception subsystem.The integrated waveguide photodetector has a peak wavelength of 1.55μm and a spectral linewidth of 1.6 nm.The designed waveguide photodetector has good performance without applied voltage bias and is optimized to achieve a bandwidth of 78 GHz and a response of 0.78 A/W with the area of 4 μm×15 μm. The integrated device is based on the component-tunable InGaAsP material to achieve monolithic integration of multifunctional devices with high performance, small size, low power consumption, and narrow line width.

关 键 词：单片集成 光子晶体滤波器 锥形耦合器 波导光探测器 零偏压 

分 类 号：TN215[电子电信—物理电子学] TN256