非平衡磁控溅射CrTiAlN涂层的制备及空蚀性能研究  

Preparation and Cavitation Erosion Resistance of CrTiAlN Coatings by Unbalanced Magnetron Sputtering

作　　者：刘铭悦 黄志全 张习羽 Ann Zammit Joseph Buhagiar Glenn Cassar 王建明 陈坚[1] LIU Ming-yue;HUANG Zhi-quan;ZHANG Xi-yu;Ann Zammit;Joseph Buhagiar;Glenn Cassar;WANG Jian-ming;CHEN Jian(School of Materials Science and Engineering,Southeast University,Nanjing 211189,China;Department of Metallurgy and Materials Engineering,University of Malta,Msida 2080,Malta)

机构地区：[1]东南大学材料科学与工程学院,南京211189 [2]Department of Metallurgy and Materials Engineering,University of Malta,Msida 2080,Malta

出　　处：《表面技术》2023年第10期367-375,共9页Surface Technology

基　　金：国家重点研发计划(2019YFE0191500);中马合作项目。

摘　　要：目的 为缓解动力系统金属表面发生的空泡失效问题,提高水下装备推进系统在复杂多变环境中的综合服役性能,将涂层技术用于金属材料的表面防护。方法 基于正交实验设计,采用非平衡磁控溅射技术在AISI316不锈钢基体上制备CrTiAlN涂层。采用XRD、SEM、EDS和AFM等测试手段对涂层的物相、形貌、成分和表面粗糙度进行表征;采用维氏硬度计、划痕仪和洛氏硬度计对涂层的显微硬度和膜基结合力进行测试与评估;通过球–盘磨损实验、电化学测试和空蚀实验,分别评价涂层的耐干摩擦磨损、耐腐蚀和抗空蚀性能。结果 实验结果表明,利用正交试验设计调控Cr、Ti和Al靶电流,基于涂层硬度得到最佳靶电流分别为4、8、8 A,此时涂层显微硬度达到1 242HV0.01,纳米硬度为(17.00±0.99) GPa,远高于316不锈钢;涂层的摩擦因数和磨损率远低于316不锈钢;在质量分数为3.5%的Na Cl溶液中,涂层的腐蚀电位较高,腐蚀电流较小,具有较好的耐腐蚀性能,采用涂层保护后316不锈钢的寿命得到显著提高;在空蚀实验后,316不锈钢的粗糙度从4.5nm增至112.0nm,并出现空蚀坑,而CrTiAlN涂层只出现了褶皱,其粗糙度从4.8 nm增至10.0 nm,仅在涂层缺陷处发生了零星剥落现象。可见,CrTiAlN涂层有效缓解了空蚀的冲击作用,提高了316不锈钢的抗空蚀性能。结论 可将CrTiAlN涂层作为防护涂层,并应用于水利工程装备关键部件。In order to improve the service performance of underwater propulsion systems in complex and variable marine environment,surface modification technology has been widely used for the protection of the metal surface.To alleviate the problem of cavitation failure on the metallic surface of the power systems,CrTiAlN coating was prepared on AISI 316 stainless steel(316 SS) substrates by unbalanced magnetron sputtering technology.Through an orthogonal experimental design,the optimal target current of Cr,Ti,Al was obtained based upon the coating hardness.The phase,morphology,composition and surface roughness of the coating were characterized by XRD,SEM,EDS and AFM.Vickers and Rockwell hardness testing and scratch testing were used to evaluate the microhardness and the adhesion of the coating.The dry friction and wear resistance,corrosion resistance and cavitation erosion resistance of the coating were evaluated by Ball-disk wear,electrochemical test and cavitation erosion test,respectively.The results showed that the optimal target current of Cr,Ti and Al was 4 A,8 A and 8 A respectively.The coating possessed 49.95% Cr,11.99% Ti,24.41% Al and 13.65% N;and the thickness and adhesion grade were 4.33 μm and HF3,respectively.Dense uniform round particles could be clearly observed on the coating surface,and the cross-sectional morphology showed that there were Cr bonding layer,CrN transition layer and CrTiAlN top layer with no obvious voids and defects.The nano-hardness of coating was(17.00±0.99)GPa much higher than that of 316 SS.During the ball-disk wear test,the friction coefficients of 316 SS and CrTiAlN coating were 0.45 and 0.34 respectively,and the maximum depth and width of wear scar of the coating were 1.13 μm and 286 μm,much less than those of 316 SS(12.14 μm and 665 μm),indicating the superior wear resistance.According to the surface morphology and composition analysis,the 316 SS suffers severe abrasive wear and oxidation wear,while the CrTiAlN coating undergoes mild oxidation wear and fatigue wear.In 3.5%NaC

关 键 词：磁控溅射 CrTiAlN涂层 摩擦磨损 腐蚀 空蚀 

分 类 号：TB33[一般工业技术—材料科学与工程]