基于磁控溅射的弱电加热结构的设计及测量研究  

Design and Measurement of Weak Current Heating Structure Based on Magnetron Sputtering

作　　者：闫晓燕[1] 梁时硕 刘雨奇 郭琦 YAN Xiao-yan;LIANG Shi-shuo;LIU Yu-qi;GUO Qi(North University of China,Taiyuan,Shanxi 030051,China)

机构地区：[1]中北大学,山西太原030051

出　　处：《计量学报》2023年第9期1347-1351,共5页Acta Metrologica Sinica

基　　金：山西省回国留学人员科研资助(2021-116)。

摘　　要：在高精度原子磁力仪中,原子气室的温度直接影响着碱金属电子自旋的极化率,从而影响磁力仪的灵敏度,因此精确地控制原子气室的温度是实现高精度原子磁力仪应用的关键。基于电加热和回折磁抵消原理,由毕奥-萨伐尔定律推导与简化模型仿真,设计完成了单层和双层结构的微型弱磁电加热结构。通过分别测量单、双层结构表面不同距离、不同电流条件下的磁通密度模,验证了回折单双层线圈结构对电流产生磁场的抑制作用。其中双层回折加热结构比回折结构的电加热剩磁抑制特性提高约6.9倍,在距电加热结构5 mm处的磁场变化率仅为72.2 nT/A,通过对比相同时间、相同工作电流的加热效应,可以发现双层具有更快的温度响应。研究表明双层回折设计可以实现原子气室弱剩磁高精度的加热方式,为原子极化提供一种简单、快速的电加热方案。In high-precision atomic magnetometer,because the temperature of the atomic gas chamber directly affects the polarization of the electron spin of alkali metal,and then affects the sensitivity of the magnetometer,precisely controlling the temperature of the atomic gas chamber is the key to realize the application of high-precision atomic magnetometer.Based on the principle of electric heating and the principle of back-folding magnetic cancellation,the micro weak magnetic electric heating chips with single-layer and double-layer structures are designed and completed through the derivation of Biot-Savart law and simplified model simulation.By measuring the magnetic flux density modes at different distances and different current conditions on the surface of single and double-layer chips,the suppression effect of the single and double-layer coil structure on the magnetic field generated by the current is verified.The double-layer heating chip is about 6.9 times higher than the electric heating remanence suppression characteristics of the folding chip.The magnetic field change rate at 5 mm from the chip is only 72.2 nT/A.By comparing the heating effect of the same working current at the same time,it can be found that the double-layer has a faster temperature response.

关 键 词：计量学 弱磁检测 原子气室 毕奥-萨伐尔定律 磁控溅射 无磁电加热结构 有限元仿真 

分 类 号：TB972[一般工业技术—计量学]