面向乳腺癌诊断的压电式微机械超声换能器的设计  

Design of Piezoelectric Micromachined Ultrasonic Transducer for Breast Cancer Diagnosis

作　　者：刘畅 程义军[1] 薛晨阳[2] 张斌珍[2] LIU Chang;CHENG Yijun;XUE Chenyang;ZHANG Binzhen(Department of Electronic Engineering,Taiyuan Institute of Technology,Taiyuan Shanxi 030008,China;Key Laboratory of Instrumentation Science&Dynamic Measurement of Ministry of Education,North University of China,Taiyuan Shanxi 030051,China)

机构地区：[1]太原工业学院电子工程系,山西太原030008 [2]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051

出　　处：《传感技术学报》2023年第9期1491-1496,共6页Chinese Journal of Sensors and Actuators

基　　金：国家重大科研仪器研制项目(61927807);山西省基础研究计划项目(20210302124099;202103021223346)。

摘　　要：面向乳腺癌早期微小病变组织难于精确诊断的问题,设计了一种基于AlN/Si薄膜的圆形双晶片压电式微机械超声换能器(PMUT)。作为乳腺超声CT系统关键检测部件,其性能优劣与诊断准确度密切相关。通过对换能器工作原理进行分析,建立了数学理论模型。利用有限元仿真软件COMSOL建立了基于AlN薄膜的PMUT有限元模型,给出了具体的结构设计参数,并分析了静态压力、静态位移、振动模态、谐振频率、灵敏度、声阻抗等性能参数。仿真结果显示,所设计的PMUT一阶谐振频率为7.61 MHz,灵敏度为-258 dB,品质因数为380.5,有效机电耦合系数为10.2%,能够满足对乳腺软组织检测的设计需求。In order to diagnose the small lesions accurately in the early stage of breast cancer,a piezoelectric micromachined ultrasonic transducer(PMUT)with circular bimorph based on AIN/Si film is proposed.As the key detection component of the breast ultrasound computed tomography system,the performance of PMUT is closely related to diagnostic accuracy.The mathematical theoretical model is established through the analysis of the working principle of the transducer.The finite element model of PMUT based on AlN thin film is established by using the finite element simulation software of COMSOL,and the specific structural design parameters are given.The static pressure,static displacement,vibration mode,resonant frequency,sensitivity and acoustic impedance are analyzed.Results of simulation indicate that the designed PMUT has a first-order resonant frequency of 7.62 MHz,a sensitivity of-258 dB,and an effective electromechanical coupling coefficient of 10.2%,which can meet the design requirements of breast soft tissue detection.

关 键 词：PMUT ALN薄膜 COMSOL 乳腺癌 

分 类 号：TB552[理学—物理]