半导体应变片式高灵敏度力矩传感器静态标定  

Static Calibration of High-Sensitivity Torque Sensor with Semiconductor Strain Gauge

作　　者：刘晓东[1] 刘琳琳 张朦丹 杨小凡 孙航 LIU Xiaodong;LIU Linlin;ZHANG Mengdan;YANG Xiaofan;SUN Hang(School of Mechanical and Energy Engineering,Tongji University,Shanghai 201804)

机构地区：[1]同济大学机械与能源工程学院,上海201804

出　　处：《现代制造技术与装备》2023年第9期122-124,共3页Modern Manufacturing Technology and Equipment

摘　　要：半导体应变片式力矩传感器广泛应用于智能机器人、航空、机械装配与制造等多个领域。对实验室自主研制的半导体应变片式力矩传感器进行静态标定实验,在刚度分析的基础上确定了传感器静态性能参数指标,验证了高灵敏度力矩传感器结构设计的合理性与使用的可靠性。Semiconductor strain gauge torque sensors are widely used in intelligent robot,aviation,mechanical assembly and manufacturing.In this paper,the static calibration experiment of the semiconductor strain gauge torque sensor independently developed by the laboratory is carried out.Based on the stiffness analysis,the static performance parameters of the sensor are determined,and the rationality of the structural design and the reliability of the use of the high-sensitivity torque sensor are verified.

关 键 词：力矩传感器 静态标定 高灵敏度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]