国产LTCC微波多层基板中的电阻埋置技术  

Resistor Embedding Technology in Domestic LTCC Microwave Multilayer Substrate

作　　者：谢廉忠[1] 游韬 王锋[1] XIE Lianzhong;YOU Tao;WANG Feng(Nanjing Research Institute of Electronics Technology,Nanjing 210039,China)

机构地区：[1]南京电子技术研究所,江苏南京210039

出　　处：《电子机械工程》2023年第5期52-55,共4页Electro-Mechanical Engineering

摘　　要：国产埋置电阻浆料采用了具有自主知识产权的材料配方和制备工艺,其浆料粘度、触变性等与进口浆料相比存在差异。为探究国产埋置电阻浆料的工程应用前景,对其进行应用技术研究。首先介绍了埋置电阻浆料的性能以及埋置电阻工艺参数与电阻阻值之间的关系,然后通过50Ω负载电阻、π型衰减器和低温共烧陶瓷(Low Temperature Co-fired Ceramic,LTCC)微波多层基板验证了埋置电阻的性能。结果表明,通过设计优化和关键工艺参数控制,埋置电阻的阻值精度和微波性能能够满足X波段收/发(Transmit/Receive,T/R)组件技术要求,可以实现国产埋置电阻浆料的工程应用。The domestic embedded resistor paste adopts the material formulation and preparation technology with independent intellectual property rights,the viscosity and thixotropy of the paste are different from those of the imported paste.In order to explore the engineering application prospect of domestic embedded resistor paste,its application technology is studied in this paper.First,the performance of embedded resistor paste,the relationship between the process parameters of embedded resistor and the resistance value are introduced.Then,the performance of embedded resistor is verified by 50Ωload resistor,πtype attenuator and LTCC(Low Temperature Co-fired Ceramic)microwave multilayer substrate.The results show that the resistance value precision and the microwave performance of embedded resistor can meet the technical requirements of Xband T/R module by design optimization and key process parameters control,and the engineering application of domestic embedded resistor paste can be realized.

关 键 词：国产 低温共烧陶瓷 微波多层基板 收/发组件 埋置电阻浆料 

分 类 号：TN958.92[电子电信—信号与信息处理]