三重四极杆电感耦合等离子体质谱法测定集成电路用N-甲基吡咯烷酮中14种金属杂质的含量  

Determination of 14Metal Impurities in N-Methylpyrrolidone for Integrated Circuits by Triple Quadrupole Inductively Coupled Plasma Mass Spectrometry

作　　者：李春华[1] 高一鸣 郝萍[1] 田玉平[1] 曹建雄 李杰[1] LI Chunhua;GAO Yiming;HAO Ping;TIAN Yuping;CAO Jianxiong;LI Jie(Shanghai Institute of Measurement and Testing Technology,Shanghai 201203,China)

机构地区：[1]上海市计量测试技术研究院,上海201203

出　　处：《理化检验（化学分册）》2023年第9期1073-1076,共4页Physical Testing and Chemical Analysis(Part B:Chemical Analysis)

基　　金：上海市2020年度“科技创新行动计划”技术标准项目(20DZ2203000);上海市市场监管局科研项目(2021-02)。

摘　　要：提出了有机加氧进样系统结合三重四极杆电感耦合等离子体质谱法测定集成电路用N-甲基吡咯烷酮(NMP)中Na、Cd、Pb、Mg、Al、Ca、Cr、Mn、Fe、Co、Ni、Cu、Zn、K等14种金属杂质含量的方法。通过氧气在线燃烧的方式降低了碳沉积对锥口的影响,采用标准加入法匹配基体效应,使用冷等离子体-氨气碰撞反应模式解决了碳元素质谱干扰的问题,如^(12) C^(12) C^(+)对^(24) Mg^(+)的干扰,^(12)C^(40) Ar+对^(52)Cr^(+)的干扰。14种元素的加标回收率为83.2%~123%,14种元素工作曲线的相关系数均大于0.9990,方法可用于分析杂质元素质量分数低于20.00ng·kg^(-1)的样品,满足先进制程的质量要求。A method was proposed for determination of 14metal impurities in N-methylpyrrolidone(NMP),including Na,Cd,Pb,Mg,Al,Ca,Cr,Mn,Fe,Co,Ni,Cu,Zn,and K,by triple quadrupole inductively coupled plasma mass spectrometry with the organic additional oxygen sampling system.The impact of carbon deposition on the cone was reduced through oxygen online combustion.The standard addition method was used for matching the matrix effect,and the mass interference from carbon element was eliminated by the cold plasma-ammonia gas collision reaction mode,such as the interferences of ^(12)C^(12) C^(+)on ^(24)Mg^(+)and ^(12)C^(40) Ar^(+)on ^(52)Cr^(+).The spiked recoveries of 14elements were 83.2%-123%,and the correlation coefficients of calibration curves for 14elements were better than 0.9990.This method was applied to the analysis of samples with mass fraction less than 20.00ng·kg^(-1),which could meet the quality requirements of advanced production processes.

关 键 词：N-甲基吡咯烷酮(NMP) 三重四极杆电感耦合等离子体质谱法 金属杂质 先进制程 

分 类 号：O657.63[理学—分析化学]