氧化钛栅介质离子敏场效应管pH传感器的研制  

Preparation and Test of Titanium Oxide Gate Dielectric ISFET pH Sensor

作　　者：黄旭东 陈伟 鹿胜康 陈凯 郜晚蕾 金庆辉 HUANG Xudong;CHEN Wei;LU Shengkang;CHEN Kai;GAO Wanlei;JIN Qinghui(Faculty of Electrical Engineering and Computer Science,Ningbo University,Ningbo 315211,Zhejang,China;Ningbo Water Meter(Group)Co.,Ltd.,Ningbo 315032,Zhejang,China)

机构地区：[1]宁波大学信息科学与工程学院,浙江宁波315211 [2]宁波水表(集团)股份有限公司,浙江宁波315032

出　　处：《实验室研究与探索》2023年第8期58-61,126,共5页Research and Exploration In Laboratory

基　　金：国家自然科学基金项目(62271242);宁波市重点研发计划项目(2022Z092)。

摘　　要：为了满足微量溶液的检测需求以及解决部分pH传感器灵产品敏度低、尺寸较大以及抗干扰性差的问题,研制了一种氧化钛(TiO_(2))栅介质离子敏场效应管pH传感器。该传感器的沟道层为铟镓锌氧化物(InGaZnO)薄膜,顶栅介质为氧化钛(TiO_(2))薄膜,源极和漏极均为金属铝(Al)薄膜;InGaZnO薄膜和TiO_(2)薄膜均由射频磁控溅射工艺制成,Al薄膜由电子束蒸发沉积工艺制成,3种薄膜材料均通过光刻、刻蚀工艺图形化。传感器具有体积小、灵敏度高、抗干扰性强的优点,尺寸仅为10 mm×15 mm,在室温(25±1)℃条件下,用半导体参数测试仪测得器件在不同pH值(4~10)溶液中的平均灵敏度为63.25 mV/pH,在K^(+)、Cl^(-)、Na^(+)、SO_(4)^(2-)离子干扰下的电压漂移量为相同浓度H^(+)离子干扰下的3%,满足当前生物医学、食品加工等领域的pH值检测需求。In order to meet the demand of micro solution detection and solve the problems of low sensitivity,large size and poor interference resistance of some pH sensors on the market,a titanium oxide(TiO_(2))gate dielectric ion-sensitive field-effect transistor pH sensor is developed.The channel layer of the ion-sensitive field effect transistor is InGaZnO thin film,the top gate dielectric is titanium oxide(TiO_(2))thin film,the source and drain are metal aluminum(Al)thin film,the InGaZnO thin film and TiO_(2) thin film are made by RF magnetron sputtering process,the Al thin film is made by electron beam evaporation deposition process,and the three thin film materials are patterned by photolithography and etching process.The sensor has the advantages of small size,high sensitivity and strong anti-interference,and the size is only 10 mm×15 mm,the sensitivity of the device in different pH(4~10)solutions is 63.25 mV/pH measured by semiconductor parameter tester at room temperature(25±1)℃,and the voltage drift under the interference of K^(+),Cl^(-),Na^(+),SO_(4)^(2-)ions is 3%of that under the interference of the same concentration of H^(+)ions,which meets the current pH detection requirements in biomedical,food processing and other fields.

关 键 词：铟镓锌氧化物 氧化钛 PH传感器 离子敏场效应管 射频磁控溅射 

分 类 号：TN[电子电信]