抗高过载MEMS器件双层异质防护结构的仿真研究  

Simulation study of double-layer heteroprotective structure for anti-high-overload MEMS devices

作　　者：冯登虎 石云波[1] 赵锐[1] 陈玉楠 张鹏[1] 闫晓朋 FENG Denghu;SHI Yunbo;ZHAO Rui;CHEN Yunan;ZHANG Peng;YAN Xiaopeng(Key Laboratory of Science and Technology on Electronic Test&Measurement,North University of China,Taiyuan 030051,China;Shanxi North Machinery Manufacturing Co Ltd,Taiyuan 030000,China)

机构地区：[1]中北大学电子测试技术重点实验室,山西太原030051 [2]山西北方机械制造有限责任公司,山西太原030000

出　　处：《传感器与微系统》2023年第11期15-18,共4页Transducer and Microsystem Technologies

基　　金：山西省基础研究计划面上资助项目(202103021224206)。

摘　　要：针对MEMS器件的缓冲防护,建立了以响应加速度峰值比来评估结构缓冲性能的不同厚度比双层异质防护结构动力学响应模型。通过数值仿真,外层环氧树脂与内层聚氨酯厚度比为2︰1的双层防护结构缓冲性能最佳。其响应加速度峰值比可达到0.47,误差小于4.60%。通过对MEMS器件的防护结构进行优化设计,为双层粘弹性材料用于MEMS器件抗高过载防护结构的研究和应用提供了理论基础和技术支持。Aiming at the damping protection of MEMS devices,dynamics response models of bilayer heterogeneous protective structures with different thickness ratios are established,which is evaluated by the ratio of response acceleration peak.Through numerical simulation,it is found that the best buffering performance embodies in the bilayer protective structure consisting of outer epoxy resin and inner polyurethane,and the thickness ratio is 2:1.The ratio of response acceleration peak can reach 0.47,and the error of the response model is less than 4.60%.Theoretical basis and technical support for the research and application of bilayer viscoelastic material using in anti-high-overload protective structures of MEMS device can be provided through the optimization design of the protective structure of MEMS devices.

关 键 词：MEMS器件 双层异质 缓冲吸能 粘弹性材料 二阶系统 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] O342[自动化与计算机技术—控制科学与工程] TH113[理学—固体力学]