基于ICP-RIE工艺和共晶键合技术的微引擎  

Microengine Based on ICP-RIE Process and Eutectic Bonding Technology

作　　者：周鑫 赖丽燕 李以贵 Zhou Xin;Lai Liyan;Li Yigui(School of Sciences,Shanghai Institude of Technology,Shanghai 201418,China)

机构地区：[1]上海应用技术大学理学院,上海201418

出　　处：《微纳电子技术》2023年第9期1481-1487,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金(62104151);上海应用技术大学引进人才基金(YJ2021-59)。

摘　　要：针对便携式设备的电源存在能量密度不够、电池寿命短、回收利用困难以及难以实现小型化等问题,设计了一种氢气作为燃料的微型往复式引擎来替代小型电源,其整体设计尺寸为52 mm×43 mm×4 mm。利用绝缘体上硅(SOI)基板制作了微型往复式引擎的零部件,包括上下盖板、燃烧室、活塞、弹簧和点火装置等;利用电感耦合等离子体-反应离子刻蚀(ICPRIE)得到垂直度接近90°的硅燃烧室、活塞等部件;利用Au-Si共晶键合等关键工艺,保证了上、下盖板与燃烧室等部件之间的气密性。为了验证微引擎的的可行性,搭建了一套测量燃烧压及活塞往复运动的实验装置,测得最大燃烧压约为50 kPa,活塞最大行程长度为1.6 mm,因此其具有广阔的应用前景。To resolve the problems of insufficient energy density,short battery life,difficulty in recycling,and difficulty in miniaturization of power sources for portable devices,a micro reciprocating engine powered by hydrogen gas was designed to replace the small power source.And the overall design size is 52 mm×43 mm×4 mm.The components of a micro reciprocating engine were made using silicon-on-insulator(SOI)substrate,including upper and lower cover plates,combustion chamber,piston,springs and ignition device.Using inductively coupled plasma reactive ion etching(ICP-RIE)process,silicon combustion chambers,piston and other components with a vertical degree close to 90°were obtained.By utilizing key processes,such as Au-Si eutectic bonding,the airtightness between the upper and lower cover plates and combustion chamber was guaranteed.To verify the feasibility of the micro engine,a set of experimental device was built to measure the combustion pressure and piston reciprocating motion.The measured maximum combustion pressure is about 50 kPa,and the maximum stroke length of the piston is 1.6 mm,thus the micro engine has broad application prospects.

关 键 词：微型往复式引擎 燃烧室 电感耦合等离子体-反应离子刻蚀(ICP-RIE) 共晶键合 燃烧压 活塞 

分 类 号：TH703[机械工程—仪器科学与技术]