SiC外延炉模块化集成制造技术探索与研究  

Exploration and Research on Modular Integrated Manufacturing Technology for SiC Epitaxial Furnace

作　　者：谢于柳 何远湘 陈庆广 XIE Yuliu;HE Yuanxiang;CHEN Qingguang(The 48th Research Institute of CETC,Changsha 410111,China)

机构地区：[1]中国电子科技集团公司第四十八研究所,湖南长沙410111

出　　处：《电子工业专用设备》2023年第5期11-14,40,共5页Equipment for Electronic Products Manufacturing

摘　　要：SiC外延炉是半导体行业中的一项重要设备,其主要作用是在衬底上生长出高品质、大面积、无杂质的SiC外延薄膜。简要介绍了SiC外延炉模块化集成制造技术,并通过实施模块化集成制造技术方案,解决了设备生产周期长的问题,有效地降低了制造成本。SiC epitaxial furnace is an important equipment in semiconductor industry,its main function is to grow high-quality,large-area,and impurity free SiC epitaxial films on the substrate.The modular integrated manufacturing technology of SiC epitaxial furnace is briefly introduced in this paper,and by means of the implementation of modular integrated manufacturing technology solutions,solving the problem of long equipment production cycle,and effectively reducing manufacturing costs.

关 键 词：碳化硅外延 外延炉 模块化 集成制造技术 

分 类 号：TN304.054[电子电信—物理电子学]