一种激光共焦位移传感器倾角误差补偿方法  

Method for Compensating Inclination Error of Laser Confocal Displacement Sensor

作　　者：胡帅 张楠 HU Shuai;ZHANG Nan(School of Information Engineering,Henan vocational college of agriculture,Zhengzhou 450000,China;School of Mechanical and Electrical Engineering,Shanxi Datong University,Datong Shanxi 037003,China)

机构地区：[1]河南农业职业学院信息工程学院,郑州450000 [2]山西大同大学机电工程学院,山西大同037003

出　　处：《机械设计与研究》2023年第5期138-141,146,共5页Machine Design And Research

基　　金：河南省科技项目(212102210130)。

摘　　要：应用激光共焦位移传感器测量物体倾角时,易受到物体颜色、位置的影响,导致误差较大,提出一种激光共焦位移传感器倾角误差补偿方法。基于激光共焦位移传感器分析结果,结合朗伯定律,对散射光场产生的光强进行计算,获取激光光束光能质心线在接收透镜中的角位置,分析激光光束与物体表面间是否呈垂直关系,若垂直说明没有发生倾斜,无需补偿;若不垂直说明物体表面发生倾斜,利用余弦定理计算出倾角,以倾角与物面间位移变量作为误差补偿结果。在不同倾角误差的测试实验中,所提方法都能实现精准补偿,具有适用性和鲁棒性。When the laser confocal displacement sensor is used to measure the inclination angle of an object,it is easy to be affected by the color and position of the object,resulting in a large error.A method for compensating the inclination angle error of the laser confocal displacement sensor is proposed.Based on the analysis results of the laser confocal displacement sensor,combined with Lamberts law,the light intensity generated by the scattered light field is calculated to obtain the angular position of the optical energy centroid of the laser beam in the receiving lens,and analyze whether the laser beam is perpendicular to the object surface.If it is vertical(i.e.no inclination),no compensation is needed.If it is not vertical,the inclination angle is calculated using the cosine theorem,and the displacement variable between the inclination angle and the object surface is taken as the error compensation result.In the test experiments of dfferent inclination errors,the proposed methods can achieve accurate compensation,and have applicability and robustness.

关 键 词：激光共焦位移传感器 倾角误差 余弦定理 朗伯定律 

分 类 号：TH744[机械工程—光学工程]