紧凑型双路TEA CO_(2)激光器谐振腔热稳定性及补偿  

Thermal stability and compensation of compact dual-path TEA CO_(2)laser resonant cavities

作　　者：朱子任 白进周 付景静 苏新军 叶静涵 刘羽 杨银辉 黄文武 李辉 郑义军 谭荣清 Zhu Ziren;Bai Jinzhou;Fu Jingjing;Su Xinjun;Ye Jinghan;Liu Yu;Yang Yinhui;Huang Wenwu;Li Hui;Zheng Yijun;Tan Rongqing(Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing 100094,China;University of Chinese Academy of Sciences,Beijing 100049,China;Science and Technology on Particle Transport and Separation Laboratory,Tianjin 300180,China)

机构地区：[1]中国科学院空天信息创新研究院,北京100094 [2]中国科学院大学,北京100049 [3]粒子输运与富集技术全国重点实验室,天津300180

出　　处：《红外与激光工程》2023年第10期55-64,共10页Infrared and Laser Engineering

基　　金：粒子输运与富集技术全国重点实验室开放课题研究基金项目(QT210005)。

摘　　要：通过实验和仿真的方法,研究了多点分布的内部热源加热作用对紧凑型双路TEA CO_(2)激光器谐振腔热稳定性的影响。采用直流风扇热交换抑制了高压电源的局部加热效应,通过调整热交换的效率,可在13~22℃环境温度范围内,使前后谐振腔镜受到的局部加热形变作用和环境温度引起的热胀冷缩作用基本抵消。为实现更宽温度范围的谐振腔稳定性,在有效热交换措施的基础上,根据模拟预测的形变规律,提出了谐振腔变形的角度补偿方法。使用传感器获得环境温度与设定初始环境温度的偏差,通过调整伺服电机步数实现对方位角的补偿,补偿值约0.28 step/℃,通过PZT促动器调整悬臂调谐结构末端位移,实现对俯仰角的补偿,补偿值约0.79μm/℃。Objective Transversely Excited Atmospheric(TEA)CO_(2)laser can achieve tunable output at 9-11μm which covers several atmospheric windows.It has improved a lot towards higher peak power and repetition frequency in the applications such as laser radar and laser manufacturing since the beginning of the 21st century.Heat effect as a product of gas discharging may bring unwelcomed effects on laser components and parts.Previous researches mainly focused on thermal deformation of laser windows under the situation of multi-kilowatt output.With the finite element theory,specific deformation data features were studied and corresponding compensation methods were proposed as well.However,thermal deformation of laser resonant cavities was commonly neglected as the huge bulk of cavities had large thermal capacity and good heat dissipation.With the recent development of lidar applications,opposite demand of TEA CO_(2)lasers for small size and high reliability was put forward.Consequently,thermal deformation of resonant cavity instead of laser window is more likely to take place due to local heat effect.By far rare research works were carried out on this topic.For this purpose,thermal stability and compensation of compact dual-path TEA CO_(2)laser resonant cavities were studied.Methods A compact dual-path TEA CO_(2)laser was developed.Deformation of resonant cavity in the action of local heat effect was measured with an indication beam(Fig.2,Eq.(14)).It was also simulated in both azimuth and pitch directions with Ansys Workbench(Fig.4-5).Hypothesis of the deformation counteract by balancing the local heat effect with thermal expansion was calculated(Fig.7)and experimentally realized by an axial flow DC fan assisted heat extraction structure(Fig.6,Fig.8).Moreover,angular compensation measures were taken after restraining the local heat effect.The azimuth angular compensation was achieved by adjusting servo motor steps under different ambient temperatures.The pitch angular compensation was realized by changing the bottom displace

关 键 词：TEA CO_(2)激光器 局部加热效应 腔体形变 角度补偿 

分 类 号：TN248.2[电子电信—物理电子学]