高陡度镜面干涉检测的仪器传递函数标定(特邀)  

Transfer function calibration of sub-aperture stitching instrument for high steep mirror testing(invited)

作　　者：蔡梦雪 王孝坤[1,2,3,4] 张志宇 李凌众[1,2,3,4] 王晶 李文涵 张学军[1,2,3,4] Cai Mengxue;Wang Xiaokun;Zhang Zhiyu;Li Lingzhong;Wang Jing;Li Wenhan;Zhang Xuejun(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;University of Chinese Academy of Sciences,Beijing 100049,China;State Key Laboratory of Applied Optics,Changchun 130033,China;Key Laboratory of Optical System Advanced Manufacturing Technology,Chinese Academy of Sciences,Changchun 130033,China)

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院大学,北京100049 [3]应用光学国家重点实验室,吉林长春130033 [4]中国科学院光学系统先进制造技术重点实验室,吉林长春130033

出　　处：《红外与激光工程》2023年第9期39-46,共8页Infrared and Laser Engineering

基　　金：国家自然科学基金项目(62127901);中国科学院大学生创新实践训练计划项目(Y9I838S)。

摘　　要：由于仪器传递函数(Instrument Transfer Function,ITF)能准确反映仪器在空间频率上的响应特征,被广泛应用于仪器规范之中。目前多采用刻有单一台阶特征或不同周期正弦特征的平面测试板对干涉仪的ITF进行检测。针对平面测试板无法完成高陡度球面/非球面镜检测时ITF标定的问题,提出了根据球面台阶测试板标定高陡度镜面检测的子孔径拼接ITF的方法。通过超精密车削技术制作了球面台阶测试板,并对其进行拼接检测,根据梯度定位法和旋转矩阵完成检测孔径中台阶的定位及采样,利用傅里叶变换方法实现对台阶实测面形的功率谱密度求解,最后与理想面形功率谱密度做比获得ITF。对口径100 mm、曲率半径100 mm、带有同心圆环台阶结构的球面台阶测试板进行拼接检测以及数据分析,实验结果表明:在1 mm-1的空间频率范围内,各个子孔径对高陡度镜面的检测水平平均可达到82.72%,具有较好的检测精度,随后ITF逐渐衰减,当空间频率在1.5 mm^(-1)左右时,仅能达到40%~60%。Objective The instrument transfer function,which accurately reflects the instrument's response characteristics in spatial frequency,is widely used in instrument specifications.Currently,flat test boards engraved with singlestep features or sinusoidal features of different periods are commonly used to measure the instrument transfer function of interferometers.However,when it comes to calibrating the instrument transfer function for high-steep spherical/non-spherical mirror testing,there is an issue with using flat test boards.Methods To address this problem,a method is proposed to calibrate the instrument transfer function for highsteep mirror testing on spherical surfaces using sub-aperture stitching,based on a spherical step test board.The spherical step test board is manufactured using ultra-precision turning technology,and the steps within the measuring apertures are located and sampled using gradient localization and rotation matrix operations.The power spectral density of the measured surface shape of the steps is obtained using Fourier transform methods,and then compared with the power spectral density of an ideal surface shape to obtain the instrument transfer function.Results and Discussions By combining examples,a spherical step test board with a diameter of 100 mm,a curvature radius of 100 mm,and concentric circular step structures was subjected to stitching testing and data analysis.The experimental results show that within the spatial frequency range of 1 mm^(-1),the average testing level of each sub-aperture for high-steep mirrors can reach 82.72%,indicating a good testing accuracy.However,as the spatial frequency approaches 1.5 mm-1,the testing level decreases to only 40%-60% for each sub-aperture,indicating poorer performance of the instrument transfer function.Conclusions This article proposes a method for calibrating the sub-aperture stitching instrument transfer function of high-steep mirror surfaces using a designed spherical step test board.In this method,a spherical test board with concentri

关 键 词：高陡度球面 高陡度非球面 仪器传递函数 子孔径拼接 球面台阶测试板 

分 类 号：O436.1[机械工程—光学工程]