大数值孔径宽光谱折反式物镜设计(特邀)  

Design of large numerical aperture and wide spectrum catadioptric objective lens(invited)

作　　者：严冬 国成立 刘泉 黎发志 余晨阳 马洋 张宇龙 闫力松 Yan Dong;Guo Chengli;Liu Quan;Li Fazhi;Yu Chenyang;Ma Yang;Zhang Yulong;Yan Lisong(School of Optical and Electronic Information,Huazhong University of Science and Technology,Wuhan 430074,China;Zhejiang Sunny Optics Co.,Ltd.,Yuyao 315400,China;College of Railway Transportation,Hunan University of Technology,Zhuzhou 412007,China)

机构地区：[1]华中科技大学光学与电子信息学院,湖北武汉430074 [2]浙江舜宇光学有限公司,浙江余姚315400 [3]湖南工业大学轨道交通学院,湖南株洲412007

出　　处：《红外与激光工程》2023年第9期58-64,共7页Infrared and Laser Engineering

基　　金：湖北省自然科学基金面上项目(2022CFB099)。

摘　　要：为了满足半导体缺陷检测系统对成像系统高分辨的要求,依据系统的特点和设计指标,设计了一种近紫外-可见光大数值孔径折反式物镜。在近紫外-可见光波段对光学玻璃材料的色散特性进行分析,通过二级光谱理论计算,选择合适的玻璃材料,对光学系统的二级光谱进行了校正。该物镜使用11片球面透镜,结构紧凑。设计出一套光谱范围为360~520 nm、数值孔径为0.9、焦距为5.65 mm、视场大小为0.8 mm、工作距离为0.8 mm的物镜,采用无限远共轭折反式结构。设计结果表明:该物镜的MTF较好,全视场波像差小于0.09λ(λ=632.8 nm),各种几何像差均得到了较好的校正,满足复消色差条件,并且结构简单,具有较长的工作距离,为实际的生产装配和应用提供了便利。Objective To fulfill the stringent high-resolution prerequisites of the imaging system deployed for semiconductor defect detection,a catadioptric objective lens with a large numerical aperture,specialized for nearultraviolet to visible light wavelengths,has been meticulously devised in accordance with the distinct characteristics and design parameters of the system.The dispersive traits of optical glass materials within the near-ultraviolet to visible light spectrum are subjected to comprehensive analysis.In order to ameliorate the secondary spectrum of the optical system,a judicious selection of appropriate glass material is undertaken based on rigorous theoretical calculations of the second-order spectrum.The constructed objective lens,comprising an assemblage of 11 spherical lenses,exhibits a compact architectural arrangement.Specifically engineered for spectral coverage spanning 360-520 nm,the objective lens boasts a numerical aperture of 0.9,a focal length of 5.65 mm,a field of view measuring 0.8 mm,and an operative distance of 0.8 mm.This innovative design embodies an infinite conjugate catadioptric configuration.The results of this design endeavor reveal a favorable Modulation Transfer Function(MTF)for the objective lens,with wave aberrations across the entire field of view quantified at less than 0.09λ(λ=632.8 nm).Furthermore,diverse geometric aberrations are effectively rectified,aligning with the stringent apochromatic prerequisites.The resultant objective lens configuration not only conforms to these demanding optical standards but also underscores simplicity in its architectural layout and an extensive operational working distance.This facilitates convenience in practical production assembly and application.Methods In the context of wide-spectrum large numerical aperture objectives,the mitigation of field curvature and secondary spectrum emerges as a focal point meriting dedicated consideration.Consequently,meticulous assessment of the field curvature and axial chromatic aberration within the system

关 键 词：宽光谱 大数值孔径 折反式物镜 物镜设计 光学设计 

分 类 号：O439[机械工程—光学工程] O436.1[理学—光学]